Vapor phase deposition of uniform and ultrathin silanes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3258, Issue , 1998, Pages 20-28

  Wang, Yuchun ^a   Ferrari, Mauro ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Deposition; Filters; Monolayer; Multilayer; Silanes; Silicon; Thin film; Uniform; Vapor

Indexed keywords

ADSORPTION; BIOMEDICAL EQUIPMENT; ELLIPSOMETRY; HYDROPHILICITY; MOISTURE; MULTILAYERS; POLYMERIZATION; PROTEINS; SCANNING ELECTRON MICROSCOPY; SILANES; SPECTROSCOPY; VAPOR DEPOSITION;

HYDROPHOBIC COATINGS;

ULTRATHIN FILMS;

EID: 0032226269     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.304385     Document Type: Conference Paper

References (13)

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