Biocompatible silicon wafer bonding for biomedical microdevices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3258, Issue , 1998, Pages 164-168

  Hansford, Derek ^a   Desai, Tejal ^a   Tu, Jay ^a   Ferrari, Mauro ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Adhesive; Biocompatible; Methacrylates; Wafer bonding

Indexed keywords

ADHESION; BIOCOMPATIBILITY; COPOLYMERS; GELS; GROWTH (MATERIALS); MEDICAL APPLICATIONS; POLYMETHYL METHACRYLATES; SILICON WAFERS; SILICONES; SUBSTRATES;

BIOMEDICAL MICRODEVICES;

BIOMEDICAL EQUIPMENT;

EID: 0032225690     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.304376     Document Type: Conference Paper

References (4)

1. Thin films and surfaces for bioactivity and biomedical applications