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Volumn 3301, Issue , 1998, Pages 108-115
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Quantum efficiency of x-ray CCDs
a a a a a a a |
Author keywords
Charge coupled devices (CCD); X ray absorption fine structure (XAFS); X rays
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Indexed keywords
DOPING (ADDITIVES);
ENERGY ABSORPTION;
PHOSPHORUS;
POLYSILICON;
QUANTUM EFFICIENCY;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTOR DEVICE STRUCTURES;
SILICA;
SILICON NITRIDE;
THIN FILMS;
X RAYS;
ENERGY TRANSMISSION;
X RAY ABSORPTION FINE STRUCTURES;
CHARGE COUPLED DEVICES;
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EID: 0032225436
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.304552 Document Type: Conference Paper |
Times cited : (2)
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References (4)
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