NIST virtual/physical random profile roughness calibration standards

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3426, Issue , 1998, Pages 213-221

  Song, J ^a   Evans, C ^a   McGlauflin, M ^a   Whitenton, E ^a   Vorburger, T ^a   Yuan, Y ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Calibration; Diamond turning; Information technology; Random profile; Specimen; Surface roughness

Indexed keywords

ALGORITHMS; CALIBRATION; INFORMATION TECHNOLOGY; ROUGHNESS MEASUREMENT; SURFACE MEASUREMENT;

DIAMOND TURNING;

SURFACE ROUGHNESS;

EID: 0032225368     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.328457     Document Type: Conference Paper

References (11)

1. Herstellung und eigenschafter von referenznormalen fur das einstellen von oberflachenmessgeraten
2. Random profile precision roughness calibration specimens
3. Diamond-turned surface-roughness standards for the calibration of interference-microscopes
4. Development in surface texture measurement
5. Measurement comparisons of stylus radii
6. Standard reference specimens in quality control of engineering surfaces
7. Surface texture