Double-ended Fizeau interferometers with phase-stepping evaluation for measurements of cubes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3477, Issue , 1998, Pages 109-115

  Nicolaus, Arnold ^a   Kang, Chu Shik ^a   Bönsch, Gerhard ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Dimensional measurements; Etalon; Fizeau interferometer; Phase stepping interferometry; Topography

Indexed keywords

ALGORITHMS; CAMERAS; CHARGE COUPLED DEVICES; GAGE BLOCKS; LIGHT INTERFERENCE; LIGHT REFLECTION; PHASE SHIFT;

FIZEAU INTERFEROMETERS;

INTERFEROMETERS;

EID: 0032225294     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.323098     Document Type: Conference Paper

References (4)

1. Phase-determination of Fizeau interferences by phase-shifting interferometry
2. Evaluation of Fizeau interferences by phase-shifting interferometry
3. Precise method to determine systematic errors in phase-shifting interferometry on Fizeau interferences
4. Interferometric testing of smooth surfaces