Efficient waveguide couplers using tilted gratings for optoelectronic interconnects

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3288, Issue , 1998, Pages 122-132

  Gan, Jianhua ^a   Bihari, Bipin ^a   Wu, Linghui ^a   Li, Feiming ^a   Dubinovsky, Michael ^a   Chen, Ray T ^a  

^a The University of Texas at Austin   (United States)

Author keywords

MCM interconnect; Optical interconnect; Waveguide grating coupler

Indexed keywords

DIFFRACTION GRATINGS; ELECTRONIC EQUIPMENT MANUFACTURE; MICROELECTRONICS; MULTICHIP MODULES; OPTICAL INTERCONNECTS; OPTOELECTRONIC DEVICES; POLYIMIDES; SEMICONDUCTING SILICON; SURFACES;

DIFFRACTION EFFICIENCY; OPTOELECTRONIC INTERCONNECTS; POLYMERIC WAVEGUIDE; SURFACE-NORMAL OPTICAL COUPLING;

WAVEGUIDE COUPLERS;

EID: 0032224298     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.307569     Document Type: Conference Paper

References (10)

1. Interconnect and packaging technology in the 90's
2. Multichip module designs for high performance applications
3. Parallel-optical interconnect development at HP laboratories
4. Polymer optical waveguide technology for multichip modules (MCMs) and board level interconnects
5. Integrated optics components and devices using periodic structures
6. Homogeneous layer models for high-spatial-frequency dielectric surface-relief gratings
7. Waveguide couplers using parallelogramic-shaped blazed gratings
8. Analysis and design of grating couplers
9. Directional reactive ion etching at oblique angles
10. Interconnect and packaging technology in the 90's