Deposition of biaxially aligned YSZ layers on polycrystalline metallic substrate

Journal of Rare Earths

Volumn 16, Issue 3, 1998, Pages 225-226

  Dongqi, Shi ^a   Jian, Yang ^a   Guansen, Yuan ^a   Jianmin, Hao ^b   Tingquan, Lei ^c  

^a GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS   (China)

^b Tianjin Electronic Materials Research Institute   (China)

^c HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

In plane texture; Modified bias sputtering; Rare earths; YSZ film

Indexed keywords

RARE EARTHS; SUBSTRATES; ZIRCONIA;

MODIFIED BIAS SPUTTERING; YTTRIA-STABILIZED ZIRCONIA; YTTRIA STABILIZED ZIRCONIA;

SUPERCONDUCTING MATERIALS;

EID: 0032217608     PISSN: 10020721     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

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