Metallic contamination assessment of silicon wafers

Microelectronic Engineering

Volumn 40, Issue 3-4, 1998, Pages 285-294

  Joly, Jean Pierre ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; CRYSTAL DEFECTS; DIFFUSION IN SOLIDS; HEAVY METALS; TRANSITION METALS;

METALLIC CONTAMINATION;

SILICON WAFERS;

EID: 0032208052     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00278-0     Document Type: Article

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