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Volumn 57, Issue 1, 1998, Pages 41-46

The oxygenated phenomena of the undoped large-grain and small-grain polycrystalline diamond films

Author keywords

Diamond film; Large grain; Oxygenated phenomenon; Small grain

Indexed keywords

GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; NUCLEATION; OXIDATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS;

EID: 0032207650     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(98)00198-9     Document Type: Article
Times cited : (10)

References (15)
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    • A.T. Collins, Diamond electronic devices - a critical appraisal, Semicond. Sci. Technol. 4 (1989) 605.
    • (1989) Semicond. Sci. Technol. , vol.4 , pp. 605
    • Collins, A.T.1
  • 8
    • 84955038298 scopus 로고
    • An investigation of electromagnetic field patterns during microwave plasma diamond thin film deposition
    • J. Zhang, B. Huang, D.K. Reinhard, J. Asmussen, An investigation of electromagnetic field patterns during microwave plasma diamond thin film deposition, J. Vac. Sci. Technol. A8 (1990) 2124.
    • (1990) J. Vac. Sci. Technol. , vol.A8 , pp. 2124
    • Zhang, J.1    Huang, B.2    Reinhard, D.K.3    Asmussen, J.4
  • 9
    • 0027580666 scopus 로고
    • Electrical properties of undoped large-grain and small-grain diamond films
    • B. Huang, D.K. Reinhard, Electrical properties of undoped large-grain and small-grain diamond films, Diamond and Related Materials 2 (1993) 812.
    • (1993) Diamond and Related Materials , vol.2 , pp. 812
    • Huang, B.1    Reinhard, D.K.2
  • 11
    • 85031632539 scopus 로고    scopus 로고
    • Southern Instrument Center, National Cheng Kung University.
    • V.G. Scientific, ESCA model 210, Southern Instrument Center, National Cheng Kung University.
    • V.G. Scientific, ESCA model 210
  • 12
    • 85033918824 scopus 로고    scopus 로고
    • Southern Instrument Center, National Cheng Kung University
    • V.G. Scientific, Microlab 310D AES, Southern Instrument Center, National Cheng Kung University.
    • V.G. Scientific, Microlab 310D AES


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.