메뉴 건너뛰기




Volumn 13, Issue 6, 1998, Pages 883-907

In situ thermocouples in macro-components fabricated using SALD and SALDVI techniques. II. Evaluation of processing parameters

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DEPOSITION; INFILTRATION; LASER APPLICATIONS; MORPHOLOGY; SILANES; SILICON CARBIDE; SILICON NITRIDE; SURFACE PROPERTIES; THERMAL EFFECTS; THERMOCOUPLES; X RAY CRYSTALLOGRAPHY;

EID: 0032206216     PISSN: 10426914     EISSN: None     Source Type: Journal    
DOI: 10.1080/10426919808935311     Document Type: Article
Times cited : (5)

References (56)
  • 2
    • 0029633955 scopus 로고
    • Rapid Prototyping Directly from the Vapor Phase
    • Wallenberger, F. T., Rapid Prototyping Directly from the Vapor Phase, Science, Vol.267, pp.1274-1275, (1995).
    • (1995) Science , vol.267 , pp. 1274-1275
    • Wallenberger, F.T.1
  • 3
    • 36749121904 scopus 로고
    • Laser Induced Chemical Vapor Deposition of Carbon
    • Leyendecker, G. and D. Bauerle, Laser Induced Chemical Vapor Deposition of Carbon, Applied Physics Letters, Vol.39, No.11, pp.921-923, (1981).
    • (1981) Applied Physics Letters , vol.39 , Issue.11 , pp. 921-923
    • Leyendecker, G.1    Bauerle, D.2
  • 4
    • 0031043478 scopus 로고    scopus 로고
    • Laser Rapid Prototyping of Photonic Band-Gap Microstructures
    • Wanke, M. C., O. Lehmann, K. Muller, Q. Wen, and M. Stuke, Laser Rapid Prototyping of Photonic Band-Gap Microstructures, Science, Vol.275, pp.1284-1286, (1997).
    • (1997) Science , vol.275 , pp. 1284-1286
    • Wanke, M.C.1    Lehmann, O.2    Muller, K.3    Wen, Q.4    Stuke, M.5
  • 5
    • 0029639810 scopus 로고    scopus 로고
    • Laser-Driven Movement of Three-Dimensional Microstructures Generated by Laser Rapid Prototyping
    • Lehmann, O. and M. Stuke, Laser-Driven Movement of Three-Dimensional Microstructures Generated by Laser Rapid Prototyping, Science, Vol.270, pp.1644-1646, (1996).
    • (1996) Science , vol.270 , pp. 1644-1646
    • Lehmann, O.1    Stuke, M.2
  • 7
    • 0003158192 scopus 로고
    • Solid Freeform Fabrication by Selective Area Laser Deposition
    • The University of Texas at Austin
    • Zong, G., R. Carnes, H. G. Wheat, and H. L. Marcus, Solid Freeform Fabrication by Selective Area Laser Deposition, Solid Freeform Fabrication Proceedings, The University of Texas at Austin, pp. 83-90, (1990).
    • (1990) Solid Freeform Fabrication Proceedings , pp. 83-90
    • Zong, G.1    Carnes, R.2    Wheat, H.G.3    Marcus, H.L.4
  • 8
    • 0028274409 scopus 로고
    • Microstructure of SiC Thin Films Produced on Graphite by Excimer-Laser Chemical Vapor Deposition
    • Suzuki, H., H. Araki, and T. Noda, Microstructure of SiC Thin Films Produced on Graphite by Excimer-Laser Chemical Vapor Deposition, Journal of Materials Science Letters, Vol.13, pp.49-52, (1994).
    • (1994) Journal of Materials Science Letters , vol.13 , pp. 49-52
    • Suzuki, H.1    Araki, H.2    Noda, T.3
  • 9
    • 3342941618 scopus 로고    scopus 로고
    • Direct Feedback Control of Gas-Phase Laser-Induced Deposition
    • The University of Texas at Austin
    • Maxwell, J. L., J. Pegna, D. Messia, and D. DeAngelis, Direct Feedback Control of Gas-Phase Laser-Induced Deposition, Solid Freeform Fabrication Proceedings, The University of Texas at Austin, pp.227-237, (1996).
    • (1996) Solid Freeform Fabrication Proceedings , pp. 227-237
    • Maxwell, J.L.1    Pegna, J.2    Messia, D.3    DeAngelis, D.4
  • 10
    • 85034472506 scopus 로고
    • Selective Area Laser Deposition - A Method of Solid Freeform Fabrication
    • J. J. Beamnan, H. L. Marcus, D. L. Bourell, J. W. Barlow, and R. H. Crawford, eds., The University of Texas at Austin
    • Richards, T. W., G. Zong, J. Tompkins, B. R. Birmingham, and H. L. Marcus, Selective Area Laser Deposition - A Method of Solid Freeform Fabrication, Solid Freeform Fabrication Proceedings, J. J. Beamnan, H. L. Marcus, D. L. Bourell, J. W. Barlow, and R. H. Crawford, eds., The University of Texas at Austin, pp.259-70, (1991).
    • (1991) Solid Freeform Fabrication Proceedings , pp. 259-270
    • Richards, T.W.1    Zong, G.2    Tompkins, J.3    Birmingham, B.R.4    Marcus, H.L.5
  • 11
    • 0003158131 scopus 로고
    • Silicon Carbide Shapes by Selective Area Laser Deposition Vapor Infiltration
    • The University of Texas at Austin
    • Birmingham, B. R., J. V. Tompkins, and H. L. Marcus, Silicon Carbide Shapes by Selective Area Laser Deposition Vapor Infiltration, Solid Freeform Fabrication Proceedings, The University of Texas at Austin, pp.348-355, (1994).
    • (1994) Solid Freeform Fabrication Proceedings , pp. 348-355
    • Birmingham, B.R.1    Tompkins, J.V.2    Marcus, H.L.3
  • 16
    • 84975400612 scopus 로고
    • Reaction and Diffusion Kinetics during the Initial Stages of Isothermal Chemical Vapor Infiltration
    • Sheldon, B. W. and T. M. Besmann, Reaction and Diffusion Kinetics During the Initial Stages of Isothermal Chemical Vapor Infiltration, Journal of the American Ceramic Society, Vol.74, pp.3046-3053, (1991).
    • (1991) Journal of the American Ceramic Society , vol.74 , pp. 3046-3053
    • Sheldon, B.W.1    Besmann, T.M.2
  • 18
    • 0028479670 scopus 로고
    • Local Equilibrium Phase Diagram: SiC Deposition in a Hot Wall LPCVD Reactor
    • Chiu, C. C., S. B. Desu, Z. J. Chen, and Y. T. Ching, Local Equilibrium Phase Diagram: SiC Deposition in a Hot Wall LPCVD Reactor, Journal of Materials Research, Vol.9, No.8, pp.2066-2071, (1994).
    • (1994) Journal of Materials Research , vol.9 , Issue.8 , pp. 2066-2071
    • Chiu, C.C.1    Desu, S.B.2    Chen, Z.J.3    Ching, Y.T.4
  • 19
    • 0027271755 scopus 로고
    • Growth Mechanism for CVD β-SiC Synthesis
    • Chiu, C. H. and M. H. Hon, Growth Mechanism for CVD β-SiC Synthesis, Scripta Metallurgica, Vol.28, pp.179-183, (1993).
    • (1993) Scripta Metallurgica , vol.28 , pp. 179-183
    • Chiu, C.H.1    Hon, M.H.2
  • 20
    • 0027626183 scopus 로고
    • The Role of Gas-Phase Reactions in Modeling of the Forced-Flow Chemical Vapor Infiltration Process
    • Tsai, C. Y., S. B. Desu, C. C. Chiu, and J. N. Reddy, The Role of Gas-Phase Reactions in Modeling of the Forced-Flow Chemical Vapor Infiltration Process, Journal of the Electrochemical Society, Vol.140, pp.2121-2124, (1993).
    • (1993) Journal of the Electrochemical Society , vol.140 , pp. 2121-2124
    • Tsai, C.Y.1    Desu, S.B.2    Chiu, C.C.3    Reddy, J.N.4
  • 22
    • 0026136872 scopus 로고
    • A Mathematical Model for Chemical Vapor Infiltration with Microwave Heating and External Cooling
    • Gupta, D. and J.W. Evans, A Mathematical Model for Chemical Vapor Infiltration with Microwave Heating and External Cooling, Journal of Materials Research, Vol.6, pp.810-818, (1991).
    • (1991) Journal of Materials Research , vol.6 , pp. 810-818
    • Gupta, D.1    Evans, J.W.2
  • 23
    • 0029277839 scopus 로고
    • Correlations between Gas Phase Supersaturation, Nucleation Process and Physico-Chemical Characteristics of Silicon Carbide Deposited from Si-C-H-Cl System on Silica Substrates
    • Lespiaux, D., F. Langlais, R. Naslain, S. Schamm, and J. Sevely, Correlations between Gas Phase Supersaturation, Nucleation Process and Physico-Chemical Characteristics of Silicon Carbide Deposited from Si-C-H-Cl System on Silica Substrates, Journal of Materials Science, Vol.30, No.6, pp.1500-1510, (1995).
    • (1995) Journal of Materials Science , vol.30 , Issue.6 , pp. 1500-1510
    • Lespiaux, D.1    Langlais, F.2    Naslain, R.3    Schamm, S.4    Sevely, J.5
  • 24
    • 0002055005 scopus 로고
    • Kinetics of Chemical Vapor Deposition of SiC between 750-850°C at 1 bar Total Pressure
    • Neuschutz, D. and F. Salehomoum, Kinetics of Chemical Vapor Deposition of SiC between 750-850°C at 1 bar Total Pressure, Materials Research Society Symposium Proceedings, Vol.250, pp.41-46, (1992).
    • (1992) Materials Research Society Symposium Proceedings , vol.250 , pp. 41-46
    • Neuschutz, D.1    Salehomoum, F.2
  • 25
    • 0025020825 scopus 로고
    • Computer Modeling of Chemical Vapor Deposition Processes
    • Zhu, D. and Y. Sahai, Computer Modeling of Chemical Vapor Deposition Processes, Journal of Material Shaping Technology, Vol.8, No.2, pp.83-90, (1990).
    • (1990) Journal of Material Shaping Technology , vol.8 , Issue.2 , pp. 83-90
    • Zhu, D.1    Sahai, Y.2
  • 26
    • 0028447308 scopus 로고
    • On the Homogeneous Chemistry of the Thermal Decomposition of Methyltrichlorosilane: Thermodynamic Analysis and Kinetic Modeling
    • Papasouliotis, G. D. and S. V. Stotichos, On the Homogeneous Chemistry of the Thermal Decomposition of Methyltrichlorosilane: Thermodynamic Analysis and Kinetic Modeling, Journal of the Electrochemical Society, Vol.141, No.6, pp.1599-1611, (1994).
    • (1994) Journal of the Electrochemical Society , vol.141 , Issue.6 , pp. 1599-1611
    • Papasouliotis, G.D.1    Stotichos, S.V.2
  • 28
    • 0020822409 scopus 로고
    • Modeling and Analysis of Low Pressure CVD Reactors
    • Jensen, K. F. and D. B. Graves, Modeling and Analysis of Low Pressure CVD Reactors, Journal of The Electrochemical Society, Vol.130, No.9, pp.1950-1957, (1983).
    • (1983) Journal of the Electrochemical Society , vol.130 , Issue.9 , pp. 1950-1957
    • Jensen, K.F.1    Graves, D.B.2
  • 29
    • 0030290827 scopus 로고    scopus 로고
    • Thermodynamic Heat Transfer and Mass Transport Modeling of the Sublimation Growth of Silicon Carbide Crystals
    • Pons, M., E. Blanquet, J. M. Dedulle, I. Garcon, R. Madar, and C. Bernard, Thermodynamic Heat Transfer and Mass Transport Modeling of the Sublimation Growth of Silicon Carbide Crystals, Journal of the Electrochemical Society, Vol.143, No.11, pp.3727-3735, (1996).
    • (1996) Journal of the Electrochemical Society , vol.143 , Issue.11 , pp. 3727-3735
    • Pons, M.1    Blanquet, E.2    Dedulle, J.M.3    Garcon, I.4    Madar, R.5    Bernard, C.6
  • 30
    • 0024619630 scopus 로고
    • Analytical Modeling of Chemical Vapor Infiltration in Fabrication of Ceramic Composites
    • Tai, N. H. and T. W. Chou, Analytical Modeling of Chemical Vapor Infiltration in Fabrication of Ceramic Composites, Journal of the American Ceramic Society, Vol.72, pp.414-420, (1989).
    • (1989) Journal of the American Ceramic Society , vol.72 , pp. 414-420
    • Tai, N.H.1    Chou, T.W.2
  • 31
    • 0026747593 scopus 로고
    • Influence of Surface Energy on the Growth of 6H- and 4H-SiC Polytypes by Sublimation
    • Stein, R. A., P. Lanig, and S. Leibenzeder, Influence of Surface Energy on the Growth of 6H- and 4H-SiC Polytypes by Sublimation, Materials Science and Engineering, Vol.B11, pp.69-71, (1992).
    • (1992) Materials Science and Engineering , vol.B11 , pp. 69-71
    • Stein, R.A.1    Lanig, P.2    Leibenzeder, S.3
  • 32
    • 38249031569 scopus 로고
    • Mathematical Modeling of Chemical Engineering Systems by Finite Element Analysis using PDE/ Protran
    • Mills, P. L. and P. A. Ramachandran, Mathematical Modeling of Chemical Engineering Systems By Finite Element Analysis using PDE/ Protran, Mathematical Computational Modeling, Vol.11, pp.375-379, (1988).
    • (1988) Mathematical Computational Modeling , vol.11 , pp. 375-379
    • Mills, P.L.1    Ramachandran, P.A.2
  • 33
    • 0025446564 scopus 로고
    • Time-Dependent Solution of the Tai-Chou Chemical Vapor Infiltration Model
    • Currier, R. P. and S.M. Valone, Time-Dependent Solution of the Tai-Chou Chemical Vapor Infiltration Model, Journal of the American Ceramic Society, Vol.73, pp.1758-1759, (1990).
    • (1990) Journal of the American Ceramic Society , vol.73 , pp. 1758-1759
    • Currier, R.P.1    Valone, S.M.2
  • 36
    • 0027556860 scopus 로고
    • A Thermodynamical Approach to Tetramethylsilane (TMS) Pyrolysis; Application to SiC Coatings Obtained by MOCVD
    • Veintemillas-Verdaguer, S., A. Figueras, and R. Rodriguez-Clemente, A Thermodynamical Approach to Tetramethylsilane (TMS) Pyrolysis; Application to SiC Coatings Obtained by MOCVD, Journal of Crystal Growth, Vol.128, pp.349-353, (1993).
    • (1993) Journal of Crystal Growth , vol.128 , pp. 349-353
    • Veintemillas-Verdaguer, S.1    Figueras, A.2    Rodriguez-Clemente, R.3
  • 37
    • 0027556162 scopus 로고
    • Growth Kinetics of Vapor-Grown SiC
    • Kaneko, T., Growth Kinetics of Vapor-Grown SiC, Journal of Crystal Growth, Vol.128, pp.354-357, (1993).
    • (1993) Journal of Crystal Growth , vol.128 , pp. 354-357
    • Kaneko, T.1
  • 38
    • 0000950370 scopus 로고
    • Advances in Modeling of the Chemical Vapor Infiltration Process
    • Starr, T. L., Advances in Modeling of the Chemical Vapor Infiltration Process, Materials Research Society Symposium Proceedings, Vol.250, pp.207-214, (1992).
    • (1992) Materials Research Society Symposium Proceedings , vol.250 , pp. 207-214
    • Starr, T.L.1
  • 39
    • 0000437626 scopus 로고
    • Review, Status, and Future of the Chemical Vapor Infiltration Process for Fabrication of Fiber-Reinforced Ceramic Composites
    • Lackey, W. J., Review, Status, and Future of the Chemical Vapor Infiltration Process for Fabrication of Fiber-Reinforced Ceramic Composites, Ceramic Engineering Science Proceedings, Vol.10, pp.557-584, (1989).
    • (1989) Ceramic Engineering Science Proceedings , vol.10 , pp. 557-584
    • Lackey, W.J.1
  • 41
    • 0021694579 scopus 로고
    • A Study on the Deposition of Pyrolytic Carbons from Hydrocarbons
    • Je, J. H. and J. Y. Lee, A Study on the Deposition of Pyrolytic Carbons from Hydrocarbons, Carbon, Vol.22, No.6, pp.563-570, (1984).
    • (1984) Carbon , vol.22 , Issue.6 , pp. 563-570
    • Je, J.H.1    Lee, J.Y.2
  • 42
    • 0026907617 scopus 로고
    • Carbon Growth by Thermal-Assisted Chemical Vapor Deposition
    • Westberg, H., M. Boman, A. S. Norekrans, and J. O. Carlsson, Carbon Growth by Thermal-Assisted Chemical Vapor Deposition, Thin Solid Films, Vol.215, pp.126-133, (1992).
    • (1992) Thin Solid Films , vol.215 , pp. 126-133
    • Westberg, H.1    Boman, M.2    Norekrans, A.S.3    Carlsson, J.O.4
  • 44
    • 0026992346 scopus 로고
    • Influence of Temperature and Tetramethylsilane Partial Pressure on the b-SiC Deposition by Cold Wall Chemical Vapor Deposition
    • Rodriguez-Clemente, R., A. Figueras, S. Garelik, B. Armas, and C. Combescure, Influence of Temperature and Tetramethylsilane Partial Pressure on the b-SiC Deposition by Cold Wall Chemical Vapor Deposition, Journal of Crystal Growth, Vol.125, pp.533-542, (1992).
    • (1992) Journal of Crystal Growth , vol.125 , pp. 533-542
    • Rodriguez-Clemente, R.1    Figueras, A.2    Garelik, S.3    Armas, B.4    Combescure, C.5
  • 46
    • 0000799273 scopus 로고
    • Investigation of the Chemical Vapor Deposition of Silicon Carbide from Tetramethylsilane by In-Situ Temperature and Gas Composition Measurements
    • Herlin, N., M. Lefebvre, M. Pealat, and J. Perrin, Investigation of the Chemical Vapor Deposition of Silicon Carbide from Tetramethylsilane by In-Situ Temperature and Gas Composition Measurements, Journal of Physical Chemistry, Vol.M96, pp.7063-7072, (1992).
    • (1992) Journal of Physical Chemistry , vol.M96 , pp. 7063-7072
    • Herlin, N.1    Lefebvre, M.2    Pealat, M.3    Perrin, J.4
  • 47
    • 0021120637 scopus 로고
    • Temperature Distributions Produced by Scanning Gaussian Laser Beams
    • Sanders, D. J., Temperature Distributions Produced by Scanning Gaussian Laser Beams, Applied Optics, Vol.23, No.1, pp.30-36, (1984).
    • (1984) Applied Optics , vol.23 , Issue.1 , pp. 30-36
    • Sanders, D.J.1
  • 48
    • 84921190990 scopus 로고
    • Evaporative Cutting of a Semi-Infinite Body with a Moving CW Laser
    • Modest, M. F. and H. Abakians, Evaporative Cutting of a Semi-Infinite Body with a Moving CW Laser, Journal of Heat Transfer, Vol.108, pp.602-607, (1986).
    • (1986) Journal of Heat Transfer , vol.108 , pp. 602-607
    • Modest, M.F.1    Abakians, H.2
  • 49
    • 0027656275 scopus 로고
    • CW Laser Machining of Hard Ceramics: Effects of Three-Dimensional Conduction, Variable Properties and Various Laser Parameters
    • Roy, S. and M. F. Modest, CW Laser Machining of Hard Ceramics: Effects of Three-Dimensional Conduction, Variable Properties and Various Laser Parameters, International Journal of Heat and Mass Transfer, Vol.36, No.14, pp.3515-3528, (1993).
    • (1993) International Journal of Heat and Mass Transfer , vol.36 , Issue.14 , pp. 3515-3528
    • Roy, S.1    Modest, M.F.2
  • 50
    • 85034485848 scopus 로고    scopus 로고
    • unpublished research
    • Harrion, S., unpublished research.
    • Harrion, S.1
  • 51
    • 0001426016 scopus 로고
    • Engineering Properties of Carbides, Engineering Materials Handbook, Ceramic and Glass
    • S. J. Schneieder, ed.
    • Shaffer, P. T. B., Engineering Properties of Carbides, Engineering Materials Handbook, Ceramic and Glass, S. J. Schneieder, ed., ASM International, Vol.4, pp.804-811, (1991).
    • (1991) ASM International , vol.4 , pp. 804-811
    • Shaffer, P.T.B.1
  • 52
    • 0040114533 scopus 로고
    • Engineering Properties of Nitrides, Engineering Materials Handbook, Ceramic and Glass
    • S. J. Schneieder, ed.
    • Hampshire, S., Engineering Properties of Nitrides, Engineering Materials Handbook, Ceramic and Glass, S. J. Schneieder, ed., ASM International, Vol.4, pp.813-820, (1991).
    • (1991) ASM International , vol.4 , pp. 813-820
    • Hampshire, S.1
  • 55
    • 0024012623 scopus 로고
    • Chemical Vapor Deposition of Silicon Carbide: An X-ray Diffraction Study
    • Sibieude, F. and G. Benezech, Chemical Vapor Deposition of Silicon Carbide: An X-ray Diffraction Study, Journal of Materials Science, Vol.23, pp.1632-1636, (1988).
    • (1988) Journal of Materials Science , vol.23 , pp. 1632-1636
    • Sibieude, F.1    Benezech, G.2
  • 56
    • 33645371155 scopus 로고
    • Chemical Vapor Deposition Modeling for High Temperature Materials
    • Gokoglu, S. A., Chemical Vapor Deposition Modeling for High Temperature Materials, Materials Research Society Symposium Proceedings, Vol.250, pp.17-28, (1992).
    • (1992) Materials Research Society Symposium Proceedings , vol.250 , pp. 17-28
    • Gokoglu, S.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.