Roll-to-roll flex lithography

Printed Circuit Fabrication

Volumn 21, Issue 11, 1998, Pages

  Jain, K ^a   Dunn, T ^a   Farmiga, N ^a   Zemel, M ^a  

^a Anvik Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOWCHARTING; MASKS; OPTICAL SYSTEMS; PATTERN MATCHING; PERFORMANCE; PHOTORESISTS; SCANNING; SUBSTRATES;

FLEXIBLE SUBSTRATES;

PHOTOLITHOGRAPHY;

EID: 0032205293     PISSN: 02748096     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)