MEMS inertial rate and acceleration sensor

IEEE Aerospace and Electronic Systems Magazine

Volumn 13, Issue 11, 1998, Pages 17-23

  Hulsing, Rand ^a,b  

^a HONEYWELL   (United States)

^b AlliedSignal   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ELECTRONIC GUIDANCE SYSTEMS; INERTIAL NAVIGATION SYSTEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; ROTATION; SILICON SENSORS; VELOCIMETERS;

ACCELERATION SENSORS; INERTIAL RATE SENSORS; MICROELECTROMECHANICAL SENSORS (MEMS);

MICROSENSORS;

EID: 0032204684     PISSN: 08858985     EISSN: None     Source Type: Journal    
DOI: 10.1109/62.730613     Document Type: Article

References (1)

1. Hulsing, R. and MacGugan, D., January 21, 1993, Miniature IMU Based on Micro-machined Coriolis Sensors, Proceedings of the National Technical Meeting, San Francisco, pp. 353-360.