Rectangular 915 MHz TM110 mode plasma cavity: Characterization and diagnostics in dinitrogen

Plasma Sources Science and Technology

Volumn 7, Issue 4, 1998, Pages 491-498

  Quensierre, J D ^a   Dupret, C ^a   Supiot, P ^a   Dessaux, O ^a   Goudmand, P ^a  

^a UNIV LILLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY RESONATORS; CHARACTERIZATION; ELECTRIC DISCHARGES; NITROGEN; PERFORMANCE; PLASMA DIAGNOSTICS; PLASMA SOURCES;

NITROGEN PLASMA; PLASMA TEMPERATURE; RECTANGULAR PLASMA CAVITY;

PLASMA FILLED WAVEGUIDES;

EID: 0032203932     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/7/4/007     Document Type: Article

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