A linear model application for the design of transparent conductive In2O3 coatings

Microelectronics Journal

Volumn 29, Issue 10, 1998, Pages 689-694

  Golan, G ^a   Axelevitch, A ^a   Rabinovitch, E ^a  

^a OPEN UNIVERSITY OF ISRAEL   (Israel)

Author keywords

DC magnetron sputtering; Indium oxide thin films; Transparent conductive coatings

Indexed keywords

ARGON; CONDUCTIVE FILMS; FILM PREPARATION; LINEAR PROGRAMMING; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; PRESSURE; SEMICONDUCTING INDIUM COMPOUNDS; SUBSTRATES; TEMPERATURE; THIN FILMS;

CONDUCTIVE INDIUM OXIDE; TRANSPARENT CONDUCTIVE COATINGS;

MICROELECTRONIC PROCESSING;

EID: 0032187548     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0026-2692(98)00034-2     Document Type: Article

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