DLTS study of nucleation stage of oxygen precipitate in silicon

Physica B: Condensed Matter

Volumn 253, Issue 1-2, 1998, Pages 123-130

  Antonova, I V ^a   Popov, V P ^a   Shaimeev, S S ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

Nucleation; Oxygen precipitates; Silicon

Indexed keywords

ANNEALING; CRYSTAL STRUCTURE; DEEP LEVEL TRANSIENT SPECTROSCOPY; NUCLEATION; OXYGEN; PHASE TRANSITIONS; PRECIPITATION (CHEMICAL);

HIGH SURFACE TO VOLUME RATIO; OXYGEN PRECIPITATE;

SILICON;

EID: 0032187352     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(98)00371-8     Document Type: Article

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