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Journal of Materials Science

Volumn 33, Issue 20, 1998, Pages 4911-4915

The chemical and morphological properties of boron-carbon alloys grown by plasma-enhanced chemical vapour deposition

(4) Zhang, D a Mcilroy, D N a O'Brien, W L b De Stasio, G c,d

a UNIVERSITY OF IDAHO (United States)

b UNIVERSITY OF WISCONSIN MADISON (United States)

c EPFL (Switzerland)

d CNR (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; AMORPHOUS FILMS; BORON COMPOUNDS; CHEMICAL BONDS; ELECTRON ENERGY LEVELS; FILM GROWTH; INCLUSIONS; MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTOR GROWTH; STOICHIOMETRY; THIN FILMS;

HYBRIDIZATION;

SEMICONDUCTING FILMS;

EID: 0032184509 PISSN: 00222461 EISSN: None Source Type: Journal
DOI: 10.1023/A:1004422016254 Document Type: Article

Times cited : (10)

References (26)

1
- 0001291099
- S. LEE, J. MAZUROWSKI, G. RAMSEYER and P. A. DOWBEN, J. Appl. Phys. 72 (1992) 4925.
- (1992) J. Appl. Phys. , vol.72 , pp. 4925
- Lee, S.¹ Mazurowski, J.² Ramseyer, G.³ Dowben, P.A.⁴

2
- 0028392764
- S. LEE and P. A. DOWBEN, Appl. Phys. A 58 (1994) 223.
- (1994) Appl. Phys. A , vol.58 , pp. 223
- Lee, S.¹ Dowben, P.A.²

3
- 0000959729
- S.-D. HWANG, D. BYUN, N. J. IANNO, P. A. DOWBEN and H. R. KIM, Appl. Phys. Lett. 68 (1996) 1495.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1495
- Hwang, S.-D.¹ Byun, D.² Ianno, N.J.³ Dowben, P.A.⁴ Kim, H.R.⁵

4
- 0001258373
- S.-D. HWANG, N. B. REMMES, P. A. DOWBEN and D. N. MCILROY, J. Vac. Sci. Technol. B 14 (1996) 2957.
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 2957
- Hwang, S.-D.¹ Remmes, N.B.² Dowben, P.A.³ Mcilroy, D.N.⁴

5
- 0031078436
- S.-D. HWANG, KEN YANG, P. A. DOWBEN, AHMAD A. AHMAD, N. J. IANNO, J. Z. LI, J. Y. LIN, H. X. JIANG and D. N. MCILROY, Appl. Phys. Lett. 70 (1997) 1028.
- (1997) Appl. Phys. Lett. , vol.70 , pp. 1028
- Hwang, S.-D.¹ Yang, K.² Dowben, P.A.³ Ahmad, A.A.⁴ Ianno, N.J.⁵ Li, J.Z.⁶ Lin, J.Y.⁷ Jiang, H.X.⁸ Mcilroy, D.N.⁹

6
- 0032158049
- D. N. MCILROY, S.-D. HWANG, KEN YANG, N. REMMES, P. A. DOWBEN, AHMAD A. AHMAD, N. J. IANNO, J. Z. LI, J. Y. LIN and H. X. JIANG, Appl. Phys. A69 (1998) 335.
- (1998) Appl. Phys. , vol.A69 , pp. 335
- Mcilroy, D.N.¹ Hwang, S.-D.² Yang, K.³ Remmes, N.⁴ Dowben, P.A.⁵ Ahmad, A.A.⁶ Ianno, N.J.⁷ Li, J.Z.⁸ Lin, J.Y.⁹ Jiang, H.X.¹⁰

7
- 0346206766
- AHMAD A. AHMAD, N. J. IANNO, P. G. SNYDER, D. WELIPITIYA, D. DYUN and P. A. DOWBEN, J. Appl. Phys. 79 (1996) 1.
- (1996) J. Appl. Phys. , vol.79 , pp. 1
- Ahmad, A.A.¹ Ianno, N.J.² Snyder, P.G.³ Welipitiya, D.⁴ Dyun, D.⁵ Dowben, P.A.⁶

8
- 0029306115
- DONGJIN BYUN, B. R. SPADY, N. J. IANNO and P. A. DOWBEN, Nanostructured Materials 5 (1995) 465.
- (1995) Nanostructured Materials , vol.5 , pp. 465
- Byun, D.¹ Spady, B.R.² Ianno, N.J.³ Dowben, P.A.⁴

9
- 2342469525
- in preparation
- D. N. MCILROY et al., in preparation.
- Mcilroy, D.N.¹

10
- 0006923284
- Boron-rich solids
- edited by D. Emin, T. L. Aselage, A. C. Switendick, B. Morosin, and C. L. Beckel, AIP, New York
- D. R. TALLANT, T. L. ASELAGE and D. EMIN, "Boron-rich solids," edited by D. Emin, T. L. Aselage, A. C. Switendick, B. Morosin, and C. L. Beckel, AIP Cof. Proc. 231 (AIP, New York, 1991) p. 177.
- (1991) AIP Cof. Proc. , vol.231 , pp. 177
- Tallant, D.R.¹ Aselage, T.L.² Emin, D.³

11
- 84987141649
- U. KUHLMANN and H. WERHEIT, Phys. Status Solidi B 175 (1993) 85.
- (1993) Phys. Status Solidi B , vol.175 , pp. 85
- Kuhlmann, U.¹ Werheit, H.²

12
- 0002286934
- J. CONARD, M. BOUCHACOURT, F. THEVENOT and G. HERMANN, J. Less-Common Metals 117 (1986) 51.
- (1986) J. Less-Common Metals , vol.117 , pp. 51
- Conard, J.¹ Bouchacourt, M.² Thevenot, F.³ Hermann, G.⁴

13
- 2342540605
- "Boron-rich solids," edited by D. Emin, T. L. Aselage, C. L. Beckel, I. A. Howard, and C. Wood, AIP, New York
- E. L. VENTURINI, L. J. AZEVEDO, D. EMIN and C. WOOD, in "Boron-rich solids," edited by D. Emin, T. L. Aselage, C. L. Beckel, I. A. Howard, and C. Wood, AIP Conf. Proc. 140 (AIP, New York, 1986) p. 292.
- (1986) AIP Conf. Proc. , vol.140 , pp. 292
- Venturini, E.L.¹ Azevedo, L.J.² Emin, D.³ Wood, C.⁴

14
- 0000783101
- "Boron-rich solids," edited by D. Emin, T. L. Aselage, C. L. Beckel, I. A. Howard, and C. Wood, AIP, New York
- CHARLES WOOD, in "Boron-rich solids," edited by D. Emin, T. L. Aselage, C. L. Beckel, I. A. Howard, and C. Wood, AIP Conf. Proc. 140 (AIP, New York, 1986) p. 206.
- (1986) AIP Conf. Proc. , vol.140 , pp. 206
- Wood, C.¹

15
- 0029185296
- HELMUT WERHEIT, Mater. Sci. Eng. B 29 (1995) 228.
- (1995) Mater. Sci. Eng. B , vol.29 , pp. 228
- Werheit, H.¹

16
- 0027833267
- H. WERHEIT, U. KUHLMANN, G. KRACH, I. HIGASHI, T. LUNDSTRÖM and Y. YU, J. Alloys Comp. 202 (1993) 269.
- (1993) J. Alloys Comp. , vol.202 , pp. 269
- Werheit, H.¹ Kuhlmann, U.² Krach, G.³ Higashi, I.⁴ Lundström, T.⁵ Yu, Y.⁶

17
- 84990647657
- U. KUHLMANN, H. WERHEIT, J. PELLOTH, W. KEUNE and T. LUNDSTRÖM, Phys. Status Solidi. (b) 187 (1995) 43.
- (1995) Phys. Status Solidi. (B) , vol.187 , pp. 43
- Kuhlmann, U.¹ Werheit, H.² Pelloth, J.³ Keune, W.⁴ Lundström, T.⁵

18
- 36449006579
- K. SHIRAI, S. EMURA, S. GONDA and Y. KUMASHIRO, J. Appl. Phys. 78 (1995) 3392.
- (1995) J. Appl. Phys. , vol.78 , pp. 3392
- Shirai, K.¹ Emura, S.² Gonda, S.³ Kumashiro, Y.⁴

19
- 0026400519
- J. I. OÑATE, A. GARCIA, V. BELLIDO and J. L. VIVIENTE, Surf. Coat. Technol. 49 (1991) 548.
- (1991) Surf. Coat. Technol. , vol.49 , pp. 548
- Oñate, J.I.¹ Garcia, A.² Bellido, V.³ Viviente, J.L.⁴

20
- 0000556993
- D. J. G. SUTHERLAND, H. AKATSU, M. COPEL, F. J. HIMPSEL, T. A. CALLCOT, J. A. CARLISLE, D. L. EDERER, J. J. JIA, I. JIMENEZ, R. PERERA, D. K. SHUH, L. J. TERMINELLO and W. M. TONG, J. Appl. Phys. 78 (1995) 6761.
- (1995) J. Appl. Phys. , vol.78 , pp. 6761
- Sutherland, D.J.G.¹ Akatsu, H.² Copel, M.³ Himpsel, F.J.⁴ Callcot, T.A.⁵ Carlisle, J.A.⁶ Ederer, D.L.⁷ Jia, J.J.⁸ Jimenez, I.⁹ Perera, R.¹⁰ Shuh, D.K.¹¹ Terminello, L.J.¹² Tong, W.M.¹³

21
- 0001485377
- GELSOMINA DE STASIO, M. CAPOZI, G. F. LORUSSO, P. A. BAUDAT, T. C. DROUBAY, P. PERFETTI, G. MARGARITONDO and B. P. TONNER, Rev. Sci. Instrum. 69 (1998) 2062.
- (1998) Rev. Sci. Instrum. , vol.69 , pp. 2062
- De Stasio, G.¹ Capozi, M.² Lorusso, G.F.³ Baudat, P.A.⁴ Droubay, T.C.⁵ Perfetti, P.⁶ Margaritondo, G.⁷ Tonner, B.P.⁸

22
- 2342530544
- "Boron-rich solids," edited by D. Emin, T. L. Aselage, C. L. Beckel, I. A. Howard, and C. Wood, AIP, New York
- H. H. MADDEN, G. C. NELSON and W. O. WALLACE, in "Boron-rich solids," edited by D. Emin, T. L. Aselage, C. L. Beckel, I. A. Howard, and C. Wood, AIP Conf. Proc. 140 (AIP, New York, 1986) p. 121.
- (1986) AIP Conf. Proc. , vol.140 , pp. 121
- Madden, H.H.¹ Nelson, G.C.² Wallace, W.O.³

23
- 26144452586
- unpublished
- I. JIMÉNEZ, D. G. J. SUTHERLAND, A. VAN BUUREN, J. A. CARLISLE, L. J. TERMINELLO and F. J. HIMPSEL, unpublished.
- Jiménez, I.¹ Sutherland, D.G.J.² Van Buuren, A.³ Carlisle, J.A.⁴ Terminello, L.J.⁵ Himpsel, F.J.⁶

24
- 1842712666
- I. JIMÉNEZ, A. JANKOWSKI, L. J. TERMINELLO, J. A. CARLISLE, D. G. J. SUTHERLAND, G. L. DOLL, J. V. MANTESE, W. M. TONG, D. K. SHUH and F. J. HIMPSEL, Appl. Phys. Lett. 68 (1996) 2816.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2816
- Jiménez, I.¹ Jankowski, A.² Terminello, L.J.³ Carlisle, J.A.⁴ Sutherland, D.G.J.⁵ Doll, G.L.⁶ Mantese, J.V.⁷ Tong, W.M.⁸ Shuh, D.K.⁹ Himpsel, F.J.¹⁰

25
- 0346206764
- I. JIMÉNEZ, A. JANKOWSKI, L. J. TERMINELLO, D. G. J. SUTHERLAND, J. A. CARLISLE, G. L. DOLL, W. M. TONG, D. K. SHUH and F. J. HIMPSEL, Phys. Rev. B 55 (1997) 1225.
- (1997) Phys. Rev. B , vol.55 , pp. 1225
- Jiménez, I.¹ Jankowski, A.² Terminello, L.J.³ Sutherland, D.G.J.⁴ Carlisle, J.A.⁵ Doll, G.L.⁶ Tong, W.M.⁷ Shuh, D.K.⁸ Himpsel, F.J.⁹

26
- 0037798014
- J. DÍAZ, G. PAOLICELLI, S. FERRER and F. COMIN, Phys. Rev. B 54 (1996) 8064.
- (1996) Phys. Rev. B , vol.54 , pp. 8064
- Díaz, J.¹ Paolicelli, G.² Ferrer, S.³ Comin, F.⁴

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