Ion plasma sputtering of multi-component materials

Vacuum

Volumn 51, Issue 2, 1998, Pages 227-230

  Volpyas, V A ^a   Hollmann, E K ^a   Plotkin, D A ^a   Goldrin, V I ^a  

^a SAINT PETERSBURG ELECTROTECHNICAL UNIVERSITY LETI   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; MATHEMATICAL MODELS; PLASMA ETCHING; REACTIVE ION ETCHING;

MULTI-COMPONENT MATERIALS; SELECTIVE SPUTTERING;

SPUTTERING;

EID: 0032183519     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00164-X     Document Type: Article

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