High-density plasma produced by a holey-plate surface-wave structure cavity

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 10, 1998, Pages 5746-5750

  Yoshida, Yoshikazu ^a   Sakurai, Takeki ^a  

^a UNIVERSITY OF YAMANASHI   (Japan)

Author keywords

Evanescent wave; Holey plate; Microwave plasma source; Partial coaxial cavity; Surface wave enhanced plasma

Indexed keywords

ARGON; CAVITY RESONATORS; ELECTRIC FIELDS; MICROWAVES; PLASMA DENSITY; SURFACE WAVES; WAVEGUIDES;

COAXIAL WAVEGUIDES; EVANESCENT WAVES; MICROWAVE PLASMA SOURCES; SURFACE WAVE ENHANCED PLASMAS;

PLASMA SOURCES;

EID: 0032181450     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.5746     Document Type: Article

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