Barium titanate-based capacitors buried into ceramic substrates

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 10 SUPPL. B, 1998, Pages

  Chen, Lih Shan ^a   Fu, Shen Li ^a   Huang, Kwan Dar ^a  

^a I SHOU UNIVERSITY   (Taiwan)

Author keywords

Barium titanate; Capacitor; Cofired; Cordierite; Low temperature

Indexed keywords

BARIUM TITANATE; CRYSTAL STRUCTURE; DENSIFICATION; ENERGY DISSIPATION; LITHIUM COMPOUNDS; MULTILAYERS; PERMITTIVITY; SINTERING; SUBSTRATES; X RAY CRYSTALLOGRAPHY;

CORDIERITE; LITHIUM FLUORIDE;

CERAMIC CAPACITORS;

EID: 0032180390     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l1241     Document Type: Article

References (11)

1. K. H. Drue, J. Muller and H. Thust: Advancing Microelectronics 24 (1997) 23.
2. H. Ochi, Y. Baba and S. Segawa: Proc. Int. Microelectron. Conf., 1995 (IMC, 1995) p. 304.
3. Y. Baba, H. Ochi and S. Segawa: IEEE Trans. Comp., Pack., Manuf. Tech. Pt. A 18 (1995) 170.
4. L. Drozdyk: Proc. 26th Int. Symp. Microelectronics, 1993 (ISHM, 1993) p. 209.
5. P. B. Amin, H. U. Anderson and C. E. Hodgkins: U.S. Patent 4082906 (1978).
6. I. Burn: J. Mater. Sci. 17 (1982) 1398.
7. B. E. Walker, Jr., R. W. Rice, R. C. Pohanka and J. R. Spann: Am. Ceram. Soc. Bull. 55 (1976) 274.
8. J. M. Haussonne, G. Desgardin, Ph. Bajolet and B. Raveau: J. Am. Ceram. Soc. 66 (1983) 801.
9. G. Desgardin, I. Mey and B. Raveay: Am. Ceram. Soc. Bull. 64 (1985) 564.
10. S. L. Fu, L. S. Chen and J. N. Lu: Microelectron. Int. 39 (1996) 20.
11. J. P. Guha and H. U. Anderson: J. Am. Ceram. Soc. 69 (1986) c. 193.