Tungsten self-sputtering yield with different incidence angles and target temperatures

Journal of Nuclear Materials

Volumn 258-263, Issue PART 1 A, 1998, Pages 917-920

  Bandourko, Vassili ^a   Jimbou, Ryutarou ^b   Nakamura, Kazuyuki ^a   Akiba, Masato ^a  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ION BOMBARDMENT; SPUTTERING; TARGETS; THERMAL EFFECTS;

INCIDENCE ANGLES; SELF-SPUTTERING; WEIGHT LOSS METHOD;

TUNGSTEN;

EID: 0032179760     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3115(98)00079-8     Document Type: Article

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