Stoichiometric and dielectric properties of BaTiO3 thin films prepared by backside pulsed ion-beam evaporation

Journal of Materials Science Letters

Volumn 17, Issue 19, 1998, Pages 1685-1687

  Sonegawa, T ^a,b   Yatsui, K ^b  

^a UNIVERSITY OF THE RYUKYUS   (Japan)

^b NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BARIUM TITANATE; DIELECTRIC PROPERTIES; EVAPORATION; FILM PREPARATION; LASER PULSES; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; STOICHIOMETRY; TEMPERATURE; X RAY PHOTOELECTRON SPECTROSCOPY;

BACKSLIDE PULSED ION BEAM EVAPORATION; VACUUM DEPOSITION;

DIELECTRIC FILMS;

EID: 0032178299     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1006699625013     Document Type: Article

References (18)

1. I. H. PRATT, Proc. IEEE 59 (1971) 1440.
2. T. L. ROSE, E. M. KELLIHER, A. N. SCOVILLE and S. E. STONE, J. Appl. Phys. 55 (1984) 3706.
3. S. T. LEE, N. FUJIMURA and T. ITO, Jpn. J. Appl. Phys. 34 (1995) 5168.
4. I.-T. KIM, C.-H. LEE and S. J. PARK, Jpn. J. Appl. Phys. 33 (1994) 5125.
5. T. HAYASHI, N. OJI and H. MAIWA, Jpn. J. Appl. Phys. 33 (1994) 5277.
6. H.-F. CHENG, M.-H. YEH, K.-S. LIU and I.-N. LIN, Jpn. J. Appl. Phys. 32 (1993) 5656.
7. Y. SHIMOTORI, M. YOKOYAMA, S. HARADA, K. MASUGATA and K. YATSUI, J. Appl. Phys. 63 (1988) 968.
8. Y. SHIMOTORI, M. YOKOYAMA, S. HARADA, K. MASUGATA and K. YATSUI, Jpn. J. Appl. Phys. 28 (1989) 468.
9. K. YATSUI, Laser and Particle Beams 7 (1989) 733.
10. X. D. KANG, K. MASUGATA and K. YATSUI, Jpn. J. Appl. Phys. 33 (1994) 1155; Ibid. 33 (1994) L1041.
11. X. D. KANG, K. MASUGATA and K. YATSUI, Jpn. J. Appl. Phys. 33 (1994) 1155; Ibid. 33 (1994) L1041.
12. K. YATSUI, X. D. KANG, T. SONEGAWA, T. MATSUOKA, K. MASUGATA, Y. SHIMOTORI, T. SATOH, S. FURUUCHI, Y. OHUCHI, T. TAKESHITA and H. YAMAMOTO, Phys. Plasmas 1 (1994) 1730.
13. G. P. JOHNSTON, P. TIWARI, D. J. REJ, H. A. DAVIS, W. J. WAGANAAR, R. E. MUENCHAUSEN, K. C. WALKER, M. NASTASI, H. K. SCHMIDT, N. KUMAR, B. LI, D. R. TALLANT, R. L. SIMPSON, D. B. WILLIAMS and X. QIU, J. Appl. Phys. 76 (1994) 5949.
14. K. YATSUI, C. GRIGORIU, H. KUBO, K. MASUGATA and Y. SHIMOTORI, Appl. Phys. Lett. 67 (1995) 1214.
15. K. YATSUI, C. GRIGORIU, K. MASUGATA, W. JIANG and T. SONEGAWA, Jpn. J. Appl. Phys. 36 (1997) 4928.
16. T. SONEGAWA, C. GRIGORIU, K. MASUGATA, K. YATSUI, Y. SHIMOTORI, S. FURUUCHI and H. YAMAMOTO, Appl. Phys. Lett. 69 (1996) 2193.
17. T. SONEGAWA, C. GRIGORIU, K. MASUGATA, K. YATSUI, Y. SHIMOTORI, S. FURUUCHI and H. YAMAMOTO, Laser and Particle Beams 14 (1996) 537.
18. A. TOKUCHI, N. NAKAMURA, T. KUNIMATSU, N. NINOMIYA, M. DEN, A. ARAKI, K. MASUGATA and K. YATSUI, in Proceedings of the 2nd Int. Top. Symp. Inertial Confinement Fusion Res. by High-Power Particle Beams, ed. by K. Yatsui (Nagaoka Univ. of Tech., 1986) p. 430.