메뉴 건너뛰기




Volumn 47, Issue 1, 1998, Pages 203-212

LA-ICP-MS, IC and DPASV-DPCSV determination of metallic impurities in solar-grade silicon

Author keywords

Ion chromatography; Laser ablation inductively coupled plasma mass spectrometry; Metallic impurities; Solar grade silicon; Voltammetry

Indexed keywords


EID: 0032170853     PISSN: 00399140     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-9140(98)00065-4     Document Type: Article
Times cited : (17)

References (12)
  • 1
    • 0010328941 scopus 로고
    • Spectrographic analysis of technical and used silicon
    • Protasov V.G. Spectrographic analysis of technical and used silicon. Zavod. Lab. 55:1989;54-55.
    • (1989) Zavod. Lab. , vol.55 , pp. 54-55
    • Protasov, V.G.1
  • 2
    • 84943998055 scopus 로고
    • General aspects of trace analytical methods. VI. Trace analysis of semiconductor materials, A. Bulk analysis
    • Analytical Chemistry Division I.U.P.A.C.
    • Analytical Chemistry Division I.U.P.A.C. General aspects of trace analytical methods. VI. Trace analysis of semiconductor materials, A. Bulk analysis. Pure Appl. Chem. 57:1985;1133-1152.
    • (1985) Pure Appl. Chem. , vol.57 , pp. 1133-1152
  • 5
    • 0010409093 scopus 로고
    • Determination of iron in semiconductor-grade silicon by furnace atomic-absorption spectrometry
    • Stewart D.A., Newton D.C. Determination of iron in semiconductor-grade silicon by furnace atomic-absorption spectrometry. Analyst. 108:1983;1450-1458.
    • (1983) Analyst , vol.108 , pp. 1450-1458
    • Stewart, D.A.1    Newton, D.C.2
  • 6
    • 0010374141 scopus 로고
    • Polarographic determination of metallic impurities on lapped silicon wafers
    • Buldini P.L., Toponi A., Zini Q. Polarographic determination of metallic impurities on lapped silicon wafers. Microchem. J. 38:1988;241-245.
    • (1988) Microchem. J. , vol.38 , pp. 241-245
    • Buldini, P.L.1    Toponi, A.2    Zini, Q.3
  • 7
    • 0030593335 scopus 로고    scopus 로고
    • Application of ion chromatography to the analysis of high-purity CdTe
    • Buldini P.L., Cavalli S., Mevoli A., Milella E. Application of ion chromatography to the analysis of high-purity CdTe. J. Chromatogr. 739:1996;131-137.
    • (1996) J. Chromatogr. , vol.739 , pp. 131-137
    • Buldini, P.L.1    Cavalli, S.2    Mevoli, A.3    Milella, E.4
  • 8
    • 0542432947 scopus 로고
    • Application of ETC-ICP-MS in semiconductor process control
    • Hub W., Amphlett H. Application of ETC-ICP-MS in semiconductor process control. Fresenius J. Anal. Chem. 350:1994;587-592.
    • (1994) Fresenius J. Anal. Chem. , vol.350 , pp. 587-592
    • Hub, W.1    Amphlett, H.2
  • 9
    • 0000151292 scopus 로고
    • in: P.J. Potts, J.F.W. Bowles, S.J.B. Reed, M.R. Cave (Eds.), Chapman and Hall, London
    • W.T. Perkins, N.J.G. Pearce, in: P.J. Potts, J.F.W. Bowles, S.J.B. Reed, M.R. Cave (Eds.), Microanalytical Techniques in the Geosciences, Chapman and Hall, London, 1995, pp. 291-325.
    • (1995) Microanalytical Techniques in the Geosciences , pp. 291-325
    • Perkins, W.T.1    Pearce, N.J.G.2
  • 10
    • 84987592445 scopus 로고
    • Determination of transition metals in natural waters by microprocessor-controlled voltammetry in comparison with graphite furnace atomic absorption spectrometry
    • Buldini P.L., Ferri D., Nobili D. Determination of transition metals in natural waters by microprocessor-controlled voltammetry in comparison with graphite furnace atomic absorption spectrometry. Electroanalysis. 3:1991;559-566.
    • (1991) Electroanalysis , vol.3 , pp. 559-566
    • Buldini, P.L.1    Ferri, D.2    Nobili, D.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.