Electrochemical microfabrication by laser-enhanced photothermal processes

IBM Journal of Research and Development

Volumn 42, Issue 5, 1998, Pages 639-652

  Von Gutfeld, R J ^a   Sheppard, K G ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; ELECTROPLATING; ETCHING; LASER APPLICATIONS;

LASER-ENHANCED ETCHING; LASER-ENHANCED PLATING;

MICROELECTRONIC PROCESSING;

EID: 0032167048     PISSN: 00188646     EISSN: None     Source Type: Journal    
DOI: 10.1147/rd.425.0639     Document Type: Article

References (34)

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