Justifying a continuous contamination monitoring system

MICRO

Volumn 16, Issue 8, 1998, Pages 51-59

  Welker, Roger ^a,b,c,d,e,f  

^a Lighthouse Worldwide Solutions ^*  (United States)

^b RW Welker Associates   (United States)

^c Lighthouse Worldwide Solutions   (United States)

^d IBM   (France)

^e UNIVERSITY OF MARYLAND   (United States)

^f DATA STORAGE INSTITUTE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CLEAN ROOMS; COMPUTER WORKSTATIONS; CONTAMINATION; COST EFFECTIVENESS; DATA ACQUISITION; DATABASE SYSTEMS; LAMINAR FLOW; MAGNETIC RECORDING; MONITORING; OPTICAL SENSORS; PARTICLES (PARTICULATE MATTER); SAMPLING;

AIRBORNE PARTICLE MONITORING SYSTEMS; CLEAN ROOM MONITORING SYSTEMS; OPTICAL PARTICLE COUNTER;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032166463     PISSN: 10810595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

1. Pariseau D, "The Future of Cleanroom Monitoring Systems," CleanRooms, 9(1):39, 1995.
2. Livingston J, Bower R, Pochy R, and Branst L, "Using an Automated Cleanroom Monitoring System to Maximize Contamination Control," MICRO, 15(9):113-123, 1997.
3. Fardi B, "An Evaluation of a Cost-Effective and Efficient Airborne Particle Monitoring System," in Proceedings of the 38th Annual Technical Meeting of the Institute of Environmental Sciences, Mount Prospect, IL, IES, pp 38-44, 1992.
4. Bzik TJ, "Statistical Management and Analysis of Particle Count Data in Ultraclean Environments," in Proceedings of the Microcontamination Conference, Santa Monica, CA, Canon Communications, pp 93-118, 1985.
5. Query CF, "Continuous Monitoring in Cleanrooms: A Guide for the First-Time User," presented at Asia-Pacific Magnetic Recording Conference, Singapore, Data Storage Institute, July 1998.