A method using V-grooves to monitor the thickness of silicon membrane with μm resolution

Journal of Micromechanics and Microengineering

Volumn 8, Issue 3, 1998, Pages 182-187

  Chang, Pei Zen ^a,c   Yang, Lung Jieh ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b TAMKANG UNIVERSITY   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MEMBRANES; MONITORING; OPTICAL RESOLVING POWER; SILICON SENSORS; THICKNESS MEASUREMENT;

GROOVES;

SILICON WAFERS;

EID: 0032166241     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/3/002     Document Type: Article

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