Calculation of gas spectra for quantitative Fourier transform infrared spectroscopy of chemical vapor deposition

Journal of the Electrochemical Society

Volumn 145, Issue 9, 1998, Pages 3212-3219

  Morrison Jr , Philip W ^a   Taweechokesupsin, Oranut ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTORS; COMPUTATIONAL METHODS; DATABASE SYSTEMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS;

INTERFEROGRAMS;

CHEMICAL VAPOR DEPOSITION;

EID: 0032163809     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838788     Document Type: Article

References (25)