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Volumn 55, Issue 1-2, 1998, Pages 179-197

Preparation and characterization of RuO2thin films

Author keywords

Electrical and optical properties; Oxides; Raman scattering; Ruthenium

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COMPOSITION EFFECTS; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; MATHEMATICAL MODELS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; RAMAN SPECTROSCOPY; RUTHENIUM COMPOUNDS; THIN FILMS;

EID: 0032162370     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(98)00057-9     Document Type: Article
Times cited : (37)

References (30)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.