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Volumn 55, Issue 1-2, 1998, Pages 179-197
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Preparation and characterization of RuO2thin films
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Author keywords
Electrical and optical properties; Oxides; Raman scattering; Ruthenium
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
COMPOSITION EFFECTS;
GRAIN BOUNDARIES;
GRAIN SIZE AND SHAPE;
MATHEMATICAL MODELS;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
RAMAN SCATTERING;
RAMAN SPECTROSCOPY;
RUTHENIUM COMPOUNDS;
THIN FILMS;
RUTILE STRUCTURES;
METALLIC FILMS;
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EID: 0032162370
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0927-0248(98)00057-9 Document Type: Article |
Times cited : (37)
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References (30)
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