V. Practical analysis of intensities with detailed examples of metals and their oxides

Surface and Interface Analysis

Volumn 26, Issue 10, 1998, Pages 701-722

  Seah, M P ^a   Gilmore, I S ^c   Bishop, H E ^a   Lorang, G ^b  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^b CNRS   (France)

^c NONE

Author keywords

Auger electron spectroscopy; Metals; Oxides; Quantification

Indexed keywords

METALS; OXIDATION; OXIDES; X RAY PHOTOELECTRON SPECTROSCOPY;

PEAK HEIGHTS; STANDARD DEVIATION;

AUGER ELECTRON SPECTROSCOPY;

EID: 0032159730     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1096-9918(199809)26:10<701::aid-sia411>3.0.co;2-d     Document Type: Article

References (61)

1. L. E. Davis, N. C. MacDonald, P. W. Palmberg, G. E. Riach and R. E. Weber, Handbook of Auger Electron Spectroscopy, 2nd edn. Physical Electronics Industries, Eden Prairie, MN (1976).
2. G. E. McGuire, Auger Electron Spectroscopy Reference Manual. Plenum Press, New York (1979).
3. Y. Shiokawa, T. Isida and Y. Hayashi, Auger Electron Spectra Catalogue: A Data Collection of Elements. Anelva, Tokyo (1979).
4. T. Sekine, Y. Nagasawa, M. Kudoh, Y. Sakai, A. S. Parkes, J. D. Geller, A. Mogami and K. Hirata, Handbook of Auger Electron Spectroscopy. JEOL, Tokyo (1082).
5. M. P. Seah, Surf. Interface Anal. 9, 85 (1986).
6. M. T. Anthony and M. P. Seah, J. Electron Spectrosc. 32, 73 (1983).
7. M. P. Seah and G. C. Smith, Surf. Interface Anal. 17, 855 (1991).
8. M. P. Seah, J. Electron Spectrosc. 71, 191 (1995).
9. M. P. Seah, J. Electron Spectrosc. 58, 345 (1992).
10. NPL Calibration System for Auger Electron Spectrometers, Version A.1. NPL, Teddington, Middlesex TW11 0LW, UK.
11. M. P. Seah, Surf. Interface Anal. 20, 865 (1993).
12. M. P. Seah, Surf. Interface Anal. 20, 876 (1993).
13. M. P. Seah and I. S. Gilmore, J. Vac. Sci. Technol. 14, 1401 (1996). (Paper I of this series)
14. M. P. Seah, I. S. Gilmore, P. J. Cumpson, J. P. Langeron and G. Lorang, ECASIA 95, ed. by H. J. Mathieu, B. Reihl and D. Briggs, p. 607. Wiley, Chichester (1996). (Paper II of this series)
15. G. Lorang, J. P. Langeron and M. P. Seah, ECASIA 95, ed. by H. J. Mathieu, B. Reihl and D. Briggs, p. 615. Wiley, Chichester (1996). (Paper III of this series)
16. L. A. Harris, J. Appl. Phys. 39, 1419 (1968).
17. M. Gryzinski, Phys. Rev. A 138, 336 (1965).
18. E. Casnati, A. Tartari and C. Baraldi, J. Phys. 15, 155 (1982).
19. R. Shimizu, Jpn. J. Appl. Phys. 22, 1631 (1983).
20. M. P. Seah and I. S. Gilmore, to be published. (Paper VIII of this series)
21. (a) E. D. Roberts, P. Weightman and C. E. Johnson, J. Phys. C 8, L301 (1975);
22. (b) P. T. Andrews and P. Weightman, J. Phys. C 11, L559 (1978).
23. P. Unsworth, N. Brooks, J. M. C. Thornton, M. Sancrotti, S. D'Addato, L. Duo, P. T. Andrews and P. Weightman, J. Electron Spectrosc. 72, 205 (1995).
24. P. Weightman, Rep. Progr. Phys. 45, 753 (1982).
25. E. Antonides, E. C. Janse and G. A. Sawatzky, Phys. Rev. B 15, 1669 (1977).
26. F. P. Larkins, J. Phys. C 11, 1965 (1978).
27. S. Tougaard, Surf. Interface Anal. 11, 453 (1988).
28. M. P. Seah, Surf. Sci. 17, 132 (1969).
29. E. N. Sickafus, Phys. Rev. B 16, 1436 (1977).
30. M. P. Seah, Surf. Interface Anal. 24, 830 (1996). (Paper IV of this series)
31. A. Jablonski, Surf. Sci. 364, 380 (1996).
32. S. Tanuma, C. J. Powell and D. R. Penn, Surf. Interface Anal. 21, 165 (1994).
33. A. Savitzky and M. J. E. Golay, Anal. Chem. 6, 1627 (1964), with corrections by J. Steiner, Y. Termonia and J. Deltour, Anal. Chem. 44, 1906 (1972).
34. A. Savitzky and M. J. E. Golay, Anal. Chem. 6, 1627 (1964), with corrections by J. Steiner, Y. Termonia and J. Deltour, Anal. Chem. 44, 1906 (1972).
35. H. H. Madden, J. Vac. Sci. Technol. 18, 677 (1981).
36. M. P. Seah, G. C. Smith and M. T. Anthony, Surf. Interface Anal. 15, 293 (1990).
37. M. P. Seah and M. Tosa, Surf. Interface Anal. 18, 240 (1992).
38. R. Kelly, Surf. Sci. 100, 85 (1980).
39. G. Betz and G. K. Wehner, in Sputtering by Particle Bombardment II, ed. by R. Behrisch, Topics in Applied Physics, Vol. 52, p. 11. Springer, Heidelberg (1983).
40. J. B. Malherbe, S. Hofmann and J. M. Sanz, Appl. Surf. Sci. 27, 355 (1986).
41. N. S. Mclntyre and T. C. Chan, in Practical Surface Analysis, Vol. 1 : Auger and X-ray Photoelectron Spectroscopies, ed. by D. Briggs and M. P. Seah, p. 485. Wiley, Chichester (1990).
42. N. S. Mclntyre and D. G. Zetaruk, Anal. Chem. 49, 1521 (1977).
43. T. J. Chuang, C. R. Brundle and D. W. Rice, Surf. Sci. 59, 413 (1976).
44. K. Wandelt, Surf. Sci. Rep. 2, 1 (1982).
45. G. A. Sawatzky and D. Post, Phys. Rev. B 20, 1546 (1979).
46. H. J. Mathieu, J. B. Mathieu, D. E. McClure and D. Landolt, J. Vac. Sci. Technol. 14, 1023 (1977).
47. R. P. Holmstrom, J. Lagowski and H. C. Gatos, Surf. Sci. 75, L781 (1978).
48. L. Fiermans and J. Vennik, Surf. Sci. 35, 42 (1973).
49. A. Many, Y. Goldstein, S. Z. Weisz and O. Resto, Appl. Phys. Lett. 53, 192 (1988).
50. D. L. Walters and C. P. Bhalla, Phys. Rev. A 4, 2164 (1971).
51. E. J. McGuire, Phys. Rev. A. 3, 1801 (1971).
52. S. Tanuma, C. J. Powell and D. R. Penn, Surf. Interface Anal. 20, 77 (1993).
53. G. C. Allen, P. M. Tucker and R. K. Wild, Surf. Sci. 68, 469 (1977).
54. C. N. R. Rao, Philos. Trans. R. Soc. A 318, 37 (1986).
55. C. N. R. Rao, D. D. Sarma and M. S. Hegde, Proc. R. Soc. A 370, 269 (1980).
56. J. A. D. Matthew and Y. Komninos, Surf. Sci. 53, 716 (1975).
57. J. C. Fuggle, in Electron Spectroscopy: Theory, Techniques and Applications, Vol. 4, ed. by C. R. Brundle and A. D. Baker, p. 85. Academic Press, London (1981).
58. J. A. D. Matthew, J. D. Nuttal and T. E. Gallon, J. Phys. C 9, 883 (1976).
59. S. Aksela, J. Varyrynen and H. Aksela, Phys. Rev. Lett. 33, 999 (1974).
60. P. Weightman, J. F. McGilp and C. E. Johnson, J. Phys. C 9, L585 (1976).
61. R. Weissmann, R. Koschatzky W. Schnellhammer and K. Muller, Appl. Phys. 13, 43 (1977).