Advances in high-resolution transmission electron microscopy

Materials Transactions, JIM

Volumn 39, Issue 9, 1998, Pages 888-902

  Phillipp, Fritz ^a  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

Atomic resolution; Cs corrector; Focus variation; High resolution transmission electron microscopy (HRTEM); High voltage microscopy; In situ HRTEM; Off axis holography; Quantitative HRTEM; Scanning transmission electron microscopy

Indexed keywords

DIGITAL SIGNAL PROCESSING; HIGH RESOLUTION ELECTRON MICROSCOPY; IMAGE ANALYSIS; IMAGING TECHNIQUES; INFORMATION RETRIEVAL; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY;

HIGH-RESOLUTION TRANSMISSION ELECTRON MICROSCOPY (HRTEM); OFF-AXIS HOLOGRAPHY; SCANNING-TRANSMISSION ELECTRON MICROSCOPY;

TRANSMISSION ELECTRON MICROSCOPY;

EID: 0032157212     PISSN: 09161821     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans1989.39.888     Document Type: Review

References (171)

1. M. J. Mills, M. S. Daw and S. M. Foiles: Ultramicroscopy, 56 (1994), 79.
2. K. L. Merkle: Interface Science, 2 (1995), 311.
3. F. Ernst: Materials Science and Engineering, R14 (1995), 97.
4. M. Rühle: Key Eng. Mater., 116 (1996), 1.
5. M. Rühle: Adv. Mat., 9 (1997), 195;
6. Handbook of Microscopy, ed. by S. A. Amelincks, D. van Dyck, J. van Landuyt and G. van Tendeloo, VCH Verlag, Weinheim, Germany, (1997), p. 253.
7. Microscopy of Semiconducting Materials 1997, Institute of Physics Conf. Ser. 157, ed. by A. G. Cullis and J. L. Hutchison, Institute of Physics Publishing, Bristol and Philadelphia, (1997).
8. Advanced Materials, Proc. 2nd NIRIM Int. Symp. on Advanced Materials (ISAM '95), Tsukuba, Ed. by Y. Bando, M. Kamo, H. Haneda and T. Aizawa, National Institute for Research in Inorganic Materials, Tsukuba, (1995).
9. Application to Materials Science on the Nanometer Scale, Proc. 1st Int. Symp. on Advanced Physical Fields, ed. by K. Yoshihara, National Research Institute for Metals, Tsukuba, (1996).
10. M. Rühle: J. Surface Analysis, 3 (1997), 157.
11. D. J. Smith: Rep. Prog. Phys., 60 (1997), 1513.
12. J. C. H. Spence: Experimental High-Resolution Electron Microscopy, Oxford University Press, New York Oxford, (1986).
13. High-Resolution Transmission Electron Microscopy and Associated Techniques, ed. by. P. Buseck, J. Cowley and L. Eyring, Oxford University Press, New York, Oxford, (1988).
14. S. Horiuchi: Fundamentals of High-Resolution Transmission Electron Microscopy, North Holland, Amsterdam, London, New York, Tokyo, (1994).
15. High-Voltage and High-Resolution Electron Microscopy, ed. by M. Rühle, F. Phillipp, A. Seeger and J. Heydenreich, Ultramicroscopy, 56, Nos. 1-3 (1994).
16. Determining Nanoscale Physical Properties of Materials by Microscopy and Spectroscopy, ed. by M. Sarikaya, H. K. Wickramasinghe and M. Isaacson, Mat. Res. Soc. Symp. Proc. 332, Materials Research Society, Pittsburg, PA, (1995).
17. Atomic Resolution Microscopy of Surfaces and Interfaces, ed. by D. J. Smith, Mat. Res. Soc. Symp. Proc. 466, Materials Research Society, Pittsburg, PA, (1997).
18. Image Analysis Methods in Quantitative Electron Microscopy, ed. by G. Möbus and M. Rühle, J. Microsc., 190, Parts 1/2 (1998).
19. K. J. Hanszen: Advances in Optical and Electron Microscopy, Vol. 4, ed. by R. Barrer and V. E. Cosslett, Academic Press, London, New York, (1972), p. 1.
20. J. M. Cowley: Diffraction Physics, 2nd edn., North Holland, Amsterdam, Oxford, New York, Tokyo, (1981).
21. R. H. Wade and J. Frank: Optik, 49 (1977), 81.
22. O. Scherzer: J. Appl. Phys., 20 (1949), 20.
23. M. A. O'Keefe: Ultramicroscopy, 47 (1992), 282.
24. L. A. Bursill: Chem. Scripta, 14 (1978-79), 181.
25. L. D. Marks: Ultramicroscopy, 12 (1984), 237.
26. H. W. Zandbergen, D. Tang and D. van Dyck: Ultramicroscopy, 64 (1996), 185.
27. J. L. Hutchison: Ultramicroscopy, 9 (1982), 191.
28. K. Ishizuka: Ultramicroscopy, 5 (1980), 55.
29. J. M. Cowley and A. F. Moodie: Acta Crystallogr., 10 (1957), 609.
30. P. Goodman and A. F. Moodie: Acta Crystallogr., A30 (1974), 280.
31. P. G. Self and M. A. O'Keefe: in Ref. 12, Chapt. 8.
32. P. A. Stadelmann: Ultramicroscopy, 21 (1987), 13.
33. C. J. H. Hetherington, U. Dahmen, M. A. O'Keefe, R. Kilaas, J. Turner, M. J. Mills and V. Vitek: Mat. Res. Soc. Symp. Proc., 183 (1990), 45.
34. J. W. Menter: Proc. Roy. Soc., A236 (1956), 119.
35. H. Bakker, A. Blecker and P. Mul: Ultramicroscopy, 64 (1996), 17.
36. O. Scherzer: Optik, 2 (1947), 114.
37. H. Rose: Optik, 85 (1990), 19.
38. H. Rose: Ultramicroscopy, 56 (1994), 11.
39. M. Haider and J. Zach: Proc. Microsc. and Microanalysis, ed. by G. W. Bailey et al., Jones and Begall, (1995), p. 596.
40. M. Haider, G. Braunshausen and E. Schwan: Optik, 99 (1995), 167.
41. H. Rose, M. Haider and K. Urban: Physikalische Blätter, 54 (1998), 411.
42. M. Haider, S. Uhlemann, E. Schwan, H. Rose, B. Kabius and K. Urban: Nature, 392 (1998), 768.
43. M. Haider and S. Uhlemann: Proc. 55th Annual Meeting of the Microscopy Society of America, ed. by G. W. Bailey, R. V. W. Dimlich, K. B. Alexander, J. J. McCarthy and T. P. Pretow, Microscopy and Microanalysis 3, Suppl. 2, (1997), p. 1179.
44. V. E. Cosslett: Cont. Phys., 22 (1981), 3.
45. D. J. Smith, R. A. Camps, V. E. Cosslett, L. A. Freeman, W. O. Saxton, W. C. Nixon, C. J. D. Catto, J. R. R. Cleaver, K. C. A. Smith and A. E. Timbs: Ultramicroscopy, 9 (1982), 203.
46. M. Hirabayashi, K. Hiraga and D. Shindo: Ultramicroscopy, 9 (1983), 197.
47. R. Gronsky and G. Thomas: Proc. 41st Ann. Meet. of the Electron Microscopy Society of America, ed. by G. W. Baile, San Francisco Press, San Francisco, (1983), p. 310.
48. H. Watanabe, T. Honda, K. Tsuno, H. Kitajima, S. Katoh, Y. Baba, H. Kobayashi, N. Yoshimura, T. Itoh, Y. Harada, S. Sakurai, Y. Noguchi and T. Etoh: Proc. 7th Int. Conf. on High-Voltage Electron Microscopy, Berkeley 1982, ed. by R. M. Fisher, R. Gronsky and K. H. Westmacott, Lawrence Berkeley Laboratory, Berkeley, CA, (1983), p. 5.
49. K. Yagi, K. Takayanagi, K. Kobayashi and S. Nagakura: in Ref. Proc. 7th Int. Conf. on High-Voltage Electron Microscopy, 47, p. 11.
50. C. J. D. Hetherington, E. C. Nelson, K. H. Westmacott, R. Gronsky and G. Thomas: Mater. Res. Soc. Symp. Proc., 139 (1989), 277.
51. S. Isoda, S. Moriguchi, H. Kurata, T. Kobayashi and N. Uyeda: Ultramicroscopy, 39 (1991), 247.
52. Y. Matsui, S. Horiuchi, Y. Bando, Y. Kitami, M. Yokoyama, S. Suehara, I. Matsui and T. Katsuda: Ultramicroscopy, 39 (1991), 8.
53. Y. Ishida and H. Ichinose: Electron Microscopy 1994, Proc. 13th Int. Congr. on Electron Microscopy, Paris, Vol. 1, ed. by B. Jouffrey and C. Colliex, Les Edition de Physique, Les Ulis, (1994), p. 161.
54. F. Phillipp, R. Höschen, M. Osaki, G. Möbus and M. Rühle: Ultramicroscopy, 56 (1994), 1.
55. G. Möbus, F. Phillipp, T. Gemming, R. Schweinfest and M. Rühle: J. Electron Microscopy, 46 (1997), 381.
56. H. Ichinose: The University of Tokyo News, 992 (1994), 4.
57. S. Horiuchi: Jap. J. Appl. Phys., 31 (1992), L1332.
58. S. Horiuchi: J. Electr. Micr., 42 (1993), 166.
59. S. Horiuchi: Ref. 13, Chap. 9.
60. S. Delclos, D. Dorignac, F. Phillipp, F. Silva and A. Gicquel: Diamond and Related Materials, 7 (1998), 222.
61. K. Nadarzinski and F. Ernst: Phil. Mag., A74 (1996), 641.
62. G. Dehm, M. Rühle, G. Ding and R. Raj: Phil. Mag., B71 (1995), 1111.
63. C. Schmidt, F. Ernst, M. W. Finnis and V. Vitek: Phys. Rev. Lett., 75 (1995), 2160.
64. F. Phillipp: Festkörperprobleme, Advances in Solid State Physics, Vol. 35, ed. by R. Helbig, Vieweg, Braunschweig/ Wiesbaden, (1995), p. 257.
65. K. Urban: Phys. Stat. Sol. (a), 56 (1979), 157.
66. G. Dehm, K. Nadarzinski, F. Ernst and M. Rühle: Ultramicroscopy, 63 (1996), 49.
67. 1 Å Exit Wave Reconstruction, ed. by Karel D. van der Mast, Ultramicroscopy, 64, Nos. 1-4 (1996).
68. D. Gabor: Proc. Roy. Soc., A197 (1949), 454.
69. J. M. Cowley: Ultramicroscopy, 41 (1992), 335.
70. H. Lichte: Ultramicroscopy, 47 (1992), 223.
71. A. Tonomura: Electron Holography, Springer, Heidelberg, (1993).
72. K. Ishizuka, T. Tanji, A. Tonomura, T. Ohno and Y. Murayama: Ultramicroscopy, 55 (1994), 197.
73. G. Möllensted and H. Düker: Z. Physik., 145 (1956), 377.
74. A. Harscher, G. Lang and H. Lichte: Ultramicroscopy, 58 (1995), 79.
75. A. Orchowski, W.-D. Rau and H. Lichte: Phys. Rev. Lett., 74 (1995), 399.
76. H. Lichte, P. Kessler, F. Lenz and W.-D. Rau: Ultramicroscopy, 52 (1993), 575.
77. A. Orchowski and H. Lichte: Ultramicroscopy, 64 (1996), 199.
78. H. Lichte, D. Geiger, A. Harscher, E. Heindl, M. Lehmann, D. Malamidis, A. Orchowski and W.-D. Rau: Ultramicroscopy, 64 (1996), 67.
79. P. Schiske: Proc. 4th European Conf. on Electron Microscopy, Rome, (1968), p. 145.
80. W. O. Saxton: Ultramicroscopy, 55 (1994), 171.
81. D. van Dyck, M. Op de Beeck and W. Coene: Optik, 93 (1993), 103.
82. M. Op de Beeck, D. van Dyck and W. Coene: Ultramicroscopy, 64 (1996), 167.
83. W. M. J. Coene, A. Thust, M. Op de Beeck and D. van Dyck: Ultramicroscopy, 64 (1996), 109.
84. W. Coene, G. Jannsen, M. Op de Beeck and D. van Dyck: Inst. Phys. Conf. Ser., 138 (1993), 225.
85. H. W. Zandbergen, D. Tang, J. Jansen and R. J. Cava: Ultramicroscopy, 64 (1996), 231.
86. H. W. Zandbergen, S. J. Andersen and J. Jansen: Science, 277 (1997), 1221.
87. A. Thust and W. M. J. Coene: Ultramicroscopy, 64 (1996), 211.
88. S. J. Pennycook and D. E. Jesson: Phys. Rev. Lett., 64 (1990), 938.
89. D. E. Jesson and S. J. Pennycook: Proc. Roy. Soc., A441 (1991), 261.
90. D. E. Jesson and S. J. Pennycook: Proc. Roy. Soc., A449 (1993), 273.
91. P. Hartel, H. Rose and C. Dinges: Ultramicroscopy, 63 (1996), 93.
92. A. Amali and P. Rez: Microsc. Microanal., 3 (1997), 28.
93. S. F. Gull and J. Skilling: IEE Proc., 31 (1984), 646.
94. A. J. McGibbon, S. J. Pennycook and D. E. Jesson: J. Microsc., to be published.
95. M. M. McGibbon, N. D. Browning, A. J. McGibbon and S. J. Pennycook: Phil. Mag., A73 (1996), 625.
96. A. J. McGibbon, S. J. Pennycook and J. E. Angelo: Science, 269 (1995), 519.
97. D. J. Wallis, N. D. Browning, S. Sivananthan, P. D. Nellist and S. J. Pennycook: Appl. Phys. Lett., 70 (1997), 3113.
98. Y. Xin, D. J. Wallis, N. D. Browning, S. Sivananthan, S. J. Pennycook and C. J. Humphreys: Microscopy and Microanalysis, 3, Suppl. 2 (1996), 461.
99. A. Thust, M. Lentzen and K. Urban: Ultramicroscopy, 53 (1994), 101.
100. G. Möbus: Ultramicroscopy, 65 (1996), 205.
101. G. Möbus and M. Rühle: Ultramicroscopy, 56 (1994), 54.
102. D. Hofmann and F. Ernst: Ultramicroscopy, 53 (1994), 205.
103. W. E. King and G. H. Campbell: Ultramicroscopy, 56 (1994), 46.
104. O. Kienzle, M. Exner and F. Ernst: in Ref 16, p. 95.
105. W. E. King, G. H. Campbell, S. M. Foiles, D. Cohen and K. M. Hanson: J. Microscopy, 190 (1998), 131.
106. G. Möbus and G. Dehm: Ultramicroscopy, 65 (1996), 217.
107. R. Bierwolf, M. Hohenstein, F. Phillipp, O. Brandt, G. E. Crook and K. Ploog: Ultramicroscopy, 49 (1993), 273.
108. P. H. Jouneau, A. Tardot, G. Feuillet, H. Mariette and J. Cibert: Inst. Phys. Conf. Ser., 134 (1993), 329.
109. M. D. Robertson, J. E. Currie, J. M. Corbel and J. B. Webb: Ultramicroscopy, 58 (1995), 175.
110. K. Tillmann, A. Thust, M. Lentzen, P. Swiatek, A. Förster, K. Urban, D. Gerthsen, T. Remmele and A. Rosenauer: Phil. Mag. Lett., 74 (1996), 309.
111. A. Rosenauer, S. Kaiser, T. Reisinger, J. Zweck and W. Gebhardt: Optik, 102 (1996), 63.
112. P. Bayle-Guillemaud and J. Thibault: Microsc. Microanal. Microstruct., 8 (1997), 125.
113. F. M. Ross, R. Kilaas, E. Snoeck, M. Hytch, A. Thorel and L. Normand: in Ref. 16, p. 245.
114. Y. Hao, N. Y. Jin-Phillipp and F. Phillipp, to be published.
115. N. Y. Jin-Phillipp and F. Phillipp: Electron Microscopy 1998, Proc. of 14th Int. Congr. on Electron Microscopy, (1998), to be published.
116. W. Sigle: Phil. Mag. A, (1998), in press.
117. J. L. Rouviere and A. Bourret: Coll de Physique C1-1, 51 (1990), 329.
118. M. I. Buckett and K. L. Merkle: Ultramicroscopy, 56 (1994), 71.
119. C. J. D. Hetherington and U. Dahmen: Scanning Microscopy Suppl., 6 (1992), 405.
120. M. Hytch: Microsc. Micronanal. Microstruct., 8 (1997), 41.
121. C. J. D. Hetherington, U. Dahmen and J.-M. Penisson: in Ref. 16, p. 215.
122. A. Ourmazd, F. H. Baumann, M. Bode and Y. Kim: Ultramicroscopy, 34 (1990), 237.
123. A. Ourmazd, D. W. Taylor, M. Bode and Y. Kim: Science, 246 (1989), 1571.
124. J. M. Penisson, F. H. Baumann, M. Bode and A. Ourmazd: Phil. Mag. Lett., 64 (1991), 239.
125. D. Stenkamp and W. Jäger: Ultramicroscopy, 21 (1993), 269.
126. C. Kisielowski, P. Schwander, F. H. Baumann, M. Seibt, Y. Kim and A. Ourmazd: Ultramicroscopy, 58 (1995), 131.
127. D. Stenkamp and H. Strunk: Appl. Phys., A62 (1996), 369.
128. H. Hashimoto, H. Endoh, A. Kumao, M. Tomita and Y. Yokota: In Situ Experiments with High Voltage Microscopes, ed. by H. Fujita, Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, Osaka, (1985), p. 295.
129. G. H. Campbell, D. K. Chan, D. L. Medlin, J. E. Angelo and C. B. Carter: Scripta Materialia, 35 (1996), 837.
130. D. L. Medlin, C. B. Carter, J. E. Angelo and M. J. Mills: Phil. Mag., A75 (1997), 733.
131. R. Sinclair and T. J. Konno: Ultramicroscopy, 56 (1994), 225.
132. T. J. Konno and R. Sinlcair, Acta Metall. Mater., 43, (1995), 471.
133. J. M. Howe and W. E. Benson: Interface Science, 2 (1995), 347.
134. H. Fujita and C. Lu: Microsc. Microanal. Microstruct., 4 (1993), 265.
135. T. Kamino, K. Sasaki and H. Saka: Microsc. Microanal., 3 (1997), 393.
136. N. Tanaka, H. Kimata and T. Kizuka: J. Electron Microsc., 45 (1996), 113.
137. H. R. Kolar, J. C. H. Spence and H. Alexander: Phys. Rev. Lett., 77 (1996), 4031.
138. E. O. Bithell, R. C. Doole, M. J. Goringe, M. D. Allen and M. Bowker: Phys. Stat. Sol. (a), 146 (1994), 461.
139. D. Boyes and P. L. Gai: Ultramicroscopy, 67 (1997), 219.
140. C. Kinoshita, Y. Tomokyo and K. Nakai: Ultramicroscopy, 56 (1994), 216.
141. X. Pan, W. Sigle, F. Phillipp and A. Seeger: Phil. Mag. Lett., 70 (1994), 203.
142. Y. Kondo and K. Takayanagi: Phys. Rev. Lett., 79 (1997), 3455.
143. D. Ugarte: Nature, 359 (1992), 707.
144. M. S. Zwanger and F. Banhart: Phil. Mag., B72 (1995), 149.
145. T. Füller and F. Banhart: Chem. Phys. Lett., 254 (1996), 433.
146. F. Banhart and P. M. Ajayan: Nature, 382 (1996), 433.
147. M. Zaiser and F. Banhart: Phys. Rev. Lett., 79 (1997), 3680.
148. A. P. Burdon and J. L. Hutchison: Carbon, 35 (1997), 567.
149. A. Taniyama, D. Shindo and T. Oikawa: J. Electr. Microsc., 45 (1996), 232.
150. P. E. Mooney, G. Y. Fan, C. E. Meyer, K. V. Truong, D. B. Bull and O. L. Krivanek: Electron Microscopy 1990, Proc. 12th Int. Congr. On Electron Microscopy, ed. by L. D. Peachey and D. B. Williams, San Francisco Press, San Francisco, (1990), p. 164.
151. I. Daberkow, K.-H. Herrmann, L. Liu, W. D. Rau and H. Tietz: Ultramicroscopy, 64 (1996), 35.
152. O. L. Krivanek, A. J. Gubbens, N. Delby and C. E. Meyer: Microsc. Microanal. Microstruct., 3 (1992), 187.
153. K. Tsuno, T. Kaneyama, T. Honda, K. Tsuda, M. Terauchi and M. Tanaka: J. Electr. Microscopy, 46 (1997), 357.
154. C. Morita, T. Ohye and H. Shimoyama: J. Electr. Microscopy, 45 (1996), 372.
155. J. M. Cowley, J. C. H. Spence and V. V. Smirnov: Ultramicroscopy, 68 (1997), 135.
156. K. Ishizuka: Ultramicroscopy, 55 (1994), 407.
157. O. L. Krivanek: Ultramicroscopy, 55 (1994), 419.
158. W. O. Saxton: Ultramicroscopy, 58 (1995), 239.
159. O. L. Krivanek and P. A. Stadelmann: Ultramicroscopy, 60 (1995), 103.
160. M. H. F. Overweijk, A. J. Bleeker and A. Thust: Ultramicroscopy, 67 (1997), 163.
161. K. L. Merkle, R. Csencsits, K. L. Rynes, J. P. Withrow and P. A. Stadelmann: J. Microscopy, 190 (1998), 204.
162. D. van Dyck and A. F. de Jong: Ultramicroscopy, 47 (1992), 266.
163. A. van den Bos: Ultramicroscopy, 47 (1992), 298.
164. M. J. Hytch and W. M. Stobbs: Ultramicroscopy, 53 (1994), 191.
165. C. B. Boothroyd: J. Microscopy, 190 (1998), 99.
166. K. V. Hochmeister and F. Phillipp: Electron Microscopy 1996, Proc. 11th Europ. Congr. on Electron Microscopy, University College Dublin, Bellfield, (1996), CDROM-T14.
167. T. Gemming and M. Rühle: Electron Microscopy 1998, Proc. 14th Int. Congr. on Electron Microscopy, Cancun, Mexico, (1998), to be published.
168. D. van Dyck and M. Op de Beeck: Ultramicroscopy, 64 (1996), 99.
169. M. Lentzen and K. Urban: Ultramicroscopy, 62 (1996), 89.
170. K. Scheerschmidt: J. Microscopy, 190 (1998), 238.
171. J. C. H. Spence: Acta Cryst., A54 (1998), 7.