Selectivity in high-temperature operated semiconductor gas-sensors

Sensors and Actuators, B: Chemical

Volumn 52, Issue 1-2, 1998, Pages 179-187

  Fleischer, M ^a   Meixner, H ^a  

^a SIEMENS AG   (Germany)

Author keywords

Ga2O3; Gas filters; Gas sensor; High temperature; Selectivity; Semiconducting metal oxides; Thick films; Thin films

Indexed keywords

FILTERS (FOR FLUIDS); OXIDES; SEMICONDUCTING FILMS; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTOR DEVICES; SURFACE TREATMENT;

GAS FILTERS; SEMICONDUCTOR GAS SENSORS;

CHEMICAL SENSORS;

EID: 0032156322     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(98)00271-8     Document Type: Article

References (19)

1. T. Seiyama, A. Kato, K. Fujishi, M. Nagatani, A new detector for gaseous components using semiconductive thin films, Anal. Chem. 34 (1962) 1502.
2. E.M. Logothetis, Procedings of the Eight Automotive Materials Conference on Ceramic Engineers and Science Procedures, Am. Ceram. Soc. 1 (1980) 281.
3. I. Lundström, M.S. Shivaraman, C.M. Svenson, A hydrogen sensitive Pd-gate mos-transistor, J. Appl. Phys. 46 (1975) 3376.
4. B. Flietner, T. Doll, J. Lechner, M. Leu, I. Eisele, Fabrication of a hybrid field-effect structure for gas detection with diverse sensitive materials, Sensors and Actuators B, 18-19 (1994).
5. M. Madou, S.R. Morrison, Chemical Sensing with Solid State Devices, Academic Press, San Diego, 1989.
6. 2 based devices, Sensors and Actuators 18 (1989) 71-113.
7. W. Göpel, Charge transfer reactions on semiconductor surfaces, in: J. Treusch (Ed.), Festkörperprobleme XX, Vieweg, Braunschweig, 1980, pp. 177-277.
8. M. Fleischer, H. Meixner, Fast chemical sensors based on high temperature stable metaloxides, Sensor and Actuators B 43 (1997) 1-10.
9. M. Fleischer, H. Meixner, Gallium oxide thin-films: a new material for high temperature oxygen sensors, Sensors and Actuators B 4 (1991) 437-441.
10. 3 thin films, Sensors and Actuators B 6-7 (1992) 257-261.
11. 3 thin-films, J. Mater. Sci. Lett. 11 (1992) 1728-1731.
12. N. Reitmeier, M. Fleischer, H. Meixner, Temperaturtransienter betrieb von metalloxid-gassensoren, Proceedings 8. GMA/ITG-Fachtagung, 11-13 March 1993.
13. G. Sbervegliery, G. Faglia, Separation of grain an contact contributions to sensitivity and selectivity of metal oxide sensors, Proceedings of the Sixth International Meeting on Chemical Sensors, Washington DC, 1997, pp. 215.
14. 2 interaction, Proceedings EUROSENSORS X, 8-11 September 1996, Leuven, Belgium, A 4-4 pp. 1031.
15. N. Yamazoe, Y. Kurokawa, T. Seyama, Effects of additives on semiconductor gas sensors, Sensors and Actuators 4 (1983) 283-289.
16. T. Schwebel, M. Fleischer, F.A. Meier, H. Meixner, Investigation of operation mechanism of co-sensor for indoor use by FTIR analysis of desorbing gases, Proceedings Eurosensors '97, Warsaw, Poland.
17. 3 thin film sensors for better sensitivity and higher selectivity, Sensors and Actuators B 35-36 (1996) 1-7.
18. 3 added ceramic with siliceous zeolithe catalyst, Proceedings of the Sixth International Meeting on Chemical Sensors, Washington 1997, OR-83.
19. 3, Sensors and Actuators B, in press (1998).