Relationship between pyroelectric properties and electrode sizes in (Pb, La)(Zr, Ti)O3 (PLZT) thin films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 9 PART B, 1998, Pages 5154-5157

  Kobune, Masafumi ^a   Ishito, Haruo ^a   Mineshige, Atsushi ^a   Fujii, Satoshi ^a   Takayama, Ryoichi ^b   Tomozawa, Atsushi ^b  

^a UNIVERSITY OF HYOGO   (Japan)

^b PANASONIC CORPORATION   (Japan)

Author keywords

Electrode size; Infrared sensor; Intermittent deposition; Photolithographic process; Pyroelectric property; Pyroelectric thin film

Indexed keywords

ELECTRODES; LEAD COMPOUNDS; MAGNETRON SPUTTERING; PYROELECTRICITY; THIN FILMS;

ELECTRODE SIZE; PYROELECTRIC THIN FILM;

DIELECTRIC FILMS;

EID: 0032155767     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.5154     Document Type: Article

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