Buried optical waveguides of porous silicon

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 9 A-B, 1998, Pages

  Takahashi, Morio ^a   Araki, Minoru ^a   Koshida, Nobuyoshi ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; ION IMPLANTATION; LUMINESCENCE; PHOTOLITHOGRAPHY; POROUS SILICON; REFRACTIVE INDEX; SEMICONDUCTING SILICON; THERMOOXIDATION; THREE DIMENSIONAL;

BURIED OPTICAL WAVEGUIDES; MONOLITHIC PROCESS; SILICON BASED PHOTONIC INTEGRATION;

OPTICAL WAVEGUIDES;

EID: 0032154660     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l1017     Document Type: Article

References (18)