SCOPUS 정보 검색 플랫폼

Volumn 33, Issue 18, 1998, Pages 4627-4632

Growth parameters on the defects formation in a grown silicon crystal

Author keywords

[No Author keywords available]

Indexed keywords

COOLING; CRYSTAL GROWTH FROM MELT; ELECTRIC CONDUCTIVITY OF SOLIDS; NUCLEATION; OXIDATION; PROBES; SOLIDIFICATION; STACKING FAULTS;

FOUR-POINT PROBE;

SILICON WAFERS;

EID: 0032154299 PISSN: 00222461 EISSN: None Source Type: Journal
DOI: 10.1023/A:1004489309683 Document Type: Article

Times cited : (3)

References (14)

1
- 0005013625
- edited by K. Sumino Elsevier North-Holland, Amsterdam
- M. HASEBE, Y. TAKEOKA, S. SHINOYAMA and S. NAITO, in "Defects control in semiconductors", edited by K. Sumino (Elsevier North-Holland, Amsterdam, 1990) p. 157.
- (1990) Defects Control in Semiconductors , pp. 157
- Hasebe, M.¹ Takeoka, Y.² Shinoyama, S.³ Naito, S.⁴

2
- 2242495173
- S. MAHAJAN, G. A. ROZGONYI and D. BASEN, Appl. Phys. Lett 30 (1997) 73.
- (1997) Appl. Phys. Lett , vol.30 , pp. 73
- Mahajan, S.¹ Rozgonyi, G.A.² Basen, D.³

3
- 2242430546
- Washington, DC, May 5-10, Extended Abstract
- Y. K. KIM, H. S. CHO, H. W. LEE, D. BUCK, J. RIGOTTE, J. YEH, S. HAHN and W. A. TILLER, in "Electrochemical Society Spring Meeting, Washington, DC, May 5-10, Extended Abstract, Vol. 91-1, 186, 1991.
- (1991) Electrochemical Society Spring Meeting , vol.91 , Issue.1 , pp. 186
- Kim, Y.K.¹ Cho, H.S.² Lee, H.W.³ Buck, D.⁴ Rigotte, J.⁵ Yeh, J.⁶ Hahn, S.⁷ Tiller, W.A.⁸

4
- 2242429623
- "Crystalline defects and contamination" edited by B. O. Kolbesen, P. Stallhofer, C. Claeys and F. Tardif
- M. PORRINI, G. BORIONETTI and G. FERRERO, in "Crystalline defects and contamination", 1993 edited by B. O. Kolbesen, P. Stallhofer, C. Claeys and F. Tardif, Proceedings of the Electrochemical Society, Vol. 93-15.
- (1993) Proceedings of the Electrochemical Society , vol.93 , Issue.15
- Porrini, M.¹ Borionetti, G.² Ferrero, G.³

5
- 2242436031
- Philadelphia, PA, May Electrochemical Society, 1987; Abstract 74
- S. N. REA and H. M. GRIMES, in Electrochemical Society Spring Meeting, Philadelphia, PA, May 1987 (Electrochemical Society, 1987); Abstract 74, p. 98.
- (1987) Electrochemical Society Spring Meeting , pp. 98
- Rea, S.N.¹ Grimes, H.M.²

6
- 2242449558
- Philadelphia, PA, May Electrochemical Society, 1989; Abstract 224
- YAMASHITA and SHIMANUKI, in Electrochemical Society Spring Meeting, Philadelphia, PA, May 1989 (Electrochemical Society, 1989); Abstract 224.
- (1989) Electrochemical Society Spring Meeting
- Yamashita¹ Shimanuki²

7
- 85013564085
- A. J. R. de KOCK and W. M. van de WIJGERT, J. Cryst. Growth 49 (1980) 718.
- (1980) J. Cryst. Growth , vol.49 , pp. 718
- De Kock, A.J.R.¹ Van De Wijgert, W.M.²

8
- 0020588149
- H. TSUYA, Y. KONDO and M. KANAMORI, Jpn. J. Appl. Phys. 22 (1983) L16.
- (1983) Jpn. J. Appl. Phys. , vol.22
- Tsuya, H.¹ Kondo, Y.² Kanamori, M.³

9
- 2242442426
- edited by C. R. Helms and B. E. Deal Plenum, New York
- 2 interface 2", edited by C. R. Helms and B. E. Deal (Plenum, New York 1993) p. 289.
- (1993) 2 Interface 2 , pp. 289
- Park, J.G.¹ Choi, S.P.² Lee, G.S.³ Jeong, Y.J.⁴ Kwak, Y.S.⁵ Shin, C.K.⁶ Hahn, S.⁷ Smith, W.⁸ Mascher, P.⁹

10
- 0017491527
- M. W. JENKINS, J. Electrochem. Soc., 124 (1977) 757.
- (1977) J. Electrochem. Soc. , vol.124 , pp. 757
- Jenkins, M.W.¹

11
- 0039562236
- F. SHIMURA, Appl. Phys. Lett. 39 (1981) 987.
- (1981) Appl. Phys. Lett. , vol.39 , pp. 987
- Shimura, F.¹

12
- 0041812712
- S. P. MURARKA, T. E. SEIDEL, J. V. DALTON, J. M. DISHMAN and M. H. READ, J. Electrochem. Soc. 127 (1980) 717.
- (1980) J. Electrochem. Soc. , vol.127 , pp. 717
- Murarka, S.P.¹ Seidel, T.E.² Dalton, J.V.³ Dishman, J.M.⁴ Read, M.H.⁵

13
- 0030785974
- R. RANTAMAKI, J. MOLARIUS, M. TILLI and T. TUOMI, Physica Scripta T 69 (1997) 264.
- (1997) Physica Scripta T , vol.69 , pp. 264
- Rantamaki, R.¹ Molarius, J.² Tilli, M.³ Tuomi, T.⁴

14
- 0004289868
- Wiley-Interscience, New York, Chapters 8 and 10
- H. F. MATARE, in "Defect electronics in semiconductors" (Wiley-Interscience, New York, 1971) Chapters 8 and 10.
- (1971) Defect Electronics in Semiconductors
- Matare, H.F.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.