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Volumn 64, Issue 8, 1998, Pages 1201-1205
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Flatness change of vacuum chuck for ultra-precision machining due to thermal deformation (1st report) - thermal behavior of vacuum chuck
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM ALLOYS;
DEFORMATION;
MACHINING;
SHAFTS (MACHINE COMPONENTS);
STEEL;
THERMAL EFFECTS;
THERMAL EXPANSION;
VACUUM APPLICATIONS;
THERMAL DEFORMATION;
ULTRA-PRECISION MACHINING;
VACUUM CHUCKS;
CHUCKS;
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EID: 0032141335
PISSN: 09120289
EISSN: None
Source Type: Journal
DOI: 10.2493/jjspe.64.1201 Document Type: Article |
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Times cited : (1)
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References (5)
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