Poly(arylethers)s with trifluoromethyl substituents as low-ε-dielectrics for microelectronics

American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

Volumn 39, Issue 2, 1998, Pages 798-799

  Maier, Gerhard ^a   Banerjee, Susanta ^a   Hecht, Reinhold ^a   Schneider, Juergen M ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CRYSTALLINE MATERIALS; GLASS TRANSITION; MOLECULAR STRUCTURE; MONOMERS; ORGANIC SOLVENTS; PERMITTIVITY; SOLUBILITY; SYNTHESIS (CHEMICAL); TEMPERATURE; THERMODYNAMIC STABILITY;

OXAZOLE MONOMER; POLYARYLETHER; POLYMER CHAIN;

FLUORINE CONTAINING POLYMERS;

EID: 0032141107     PISSN: 00323934     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)