Preparation and crystallization of Pb(Zr0.95Ti0.05)O3 thin films deposited by radio-frequency magnetron sputtering with a stoichiometric ceramic target

Applied Physics A: Materials Science and Processing

Volumn 67, Issue 2, 1998, Pages 253-258

  Lu, C J ^a,b   Shen, H M ^a   Wang, Y N ^a  

^a NANJING UNIVERSITY   (China)

^b INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CRYSTAL ORIENTATION; CRYSTALLIZATION; FERROELECTRIC MATERIALS; FILM PREPARATION; LEAD COMPOUNDS; MAGNETRON SPUTTERING; PEROVSKITE; RAPID THERMAL ANNEALING; SPUTTER DEPOSITION; STOICHIOMETRY; THIN FILMS;

LEAD ZIRCONATE TITANATE;

DIELECTRIC FILMS;

EID: 0032138922     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050767     Document Type: Article

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