SCOPUS 정보 검색 플랫폼

Volumn 133, Issue 4, 1998, Pages 251-269

Gas-dynamic effects in the laser-pulse sputtering of AlN: Is there evidence for phase explosion?

(7) Kelly, Roger a Miotello, Antonio a Mele, Aldo b Guidoni, Anna Giardini b Hastie, John W c Schenck, Peter K c Okabe, Hideo d

a UNIVERSITY OF TRENTO (Italy)

b SAPIENZA UNIVERSITY OF ROME (Italy)

c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

d HOWARD UNIVERSITY (United States)

Author keywords

AlN; Fluorescence; Thermodynamic critical temperature

Indexed keywords

NITRIDES; PARTICLES (PARTICULATE MATTER); PHASE TRANSITIONS; POLYCRYSTALS; PULSED LASER APPLICATIONS; SPUTTERING; VAPORIZATION;

ALUMINUM NITRIDE; PHASE EXPLOSION; THERMODYNAMIC CRITICAL TEMPERATURE;

ALUMINUM COMPOUNDS;

EID: 0032138641 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(98)00203-7 Document Type: Article

Times cited : (27)

References (82)

1
- 0001562975
- R. Kelly, R.W. Dreyfus, Surf. Sci. 198 (1988) 263.
- (1988) Surf. Sci. , vol.198 , pp. 263
- Kelly, R.¹ Dreyfus, R.W.²

2
- 0038673656
- I. NoorBatcha, R.R. Lucchese, Y. Zeiri, J. Chem. Phys. 86 (1987) 5816.
- (1987) J. Chem. Phys. , vol.86 , pp. 5816
- NoorBatcha, I.¹ Lucchese, R.R.² Zeiri, Y.³

3
- 33645089902
- I. NoorBatcha, R.R. Lucchese, Y. Zeiri, Phys. Rev. 36 (1987) 4978.
- (1987) Phys. Rev. , vol.36 , pp. 4978
- NoorBatcha, I.¹ Lucchese, R.R.² Zeiri, Y.³

4
- 35949007430
- A. Peterlongo, A. Miotello, R. Kelly, Phys. Rev. E 50 (1994) 4716.
- (1994) Phys. Rev. E , vol.50 , pp. 4716
- Peterlongo, A.¹ Miotello, A.² Kelly, R.³

5
- 0001127974
- J.P. Cowin, D.J. Auerbach, C. Becker, L. Wharton, Surf. Sci. 78 (1978) 545.
- (1978) Surf. Sci. , vol.78 , pp. 545
- Cowin, J.P.¹ Auerbach, D.J.² Becker, C.³ Wharton, L.⁴

6
- 0001737377
- E.B.D. Bourdon, P. Das, I. Harrison, J.C. Polanyi, J. Segner, C.D. Stanners, R.J. Williams, P.A. Young, Faraday Disc. Chem. Soc. 82 (1986) 343.
- (1986) Faraday Disc. Chem. Soc. , vol.82 , pp. 343
- Bourdon, E.B.D.¹ Das, P.² Harrison, I.³ Polanyi, J.C.⁴ Segner, J.⁵ Stanners, C.D.⁶ Williams, R.J.⁷ Young, P.A.⁸

7
- 36549096046
- R. Kelly, J. Chem. Phys. 92 (1990) 5047.
- (1990) J. Chem. Phys. , vol.92 , pp. 5047
- Kelly, R.¹

8
- 0022076820
- R. Kelly, J.J. Cuomo, P.A. Leary, J.E. Rothenberg, B.E. Braren, C.F. Aliotta, Nucl. Instr. Meth. B 9 (1985) 329.
- (1985) Nucl. Instr. Meth. B , vol.9 , pp. 329
- Kelly, R.¹ Cuomo, J.J.² Leary, P.A.³ Rothenberg, J.E.⁴ Braren, B.E.⁵ Aliotta, C.F.⁶

9
- 0024737482
- R. Srinivasan, B. Braren, Chem. Rev. 89 (1989) 1303.
- (1989) Chem. Rev. , vol.89 , pp. 1303
- Srinivasan, R.¹ Braren, B.²

10
- 0027271048
- A.J. Pedraza, J-Y. Zhang, H. Esrom, Mater. Res. Soc. Symp. Proc. 285 (1993) 209.
- (1993) Mater. Res. Soc. Symp. Proc. , vol.285 , pp. 209
- Pedraza, A.J.¹ Zhang, J.-Y.² Esrom, H.³

11
- 0346029336
- J. Singh, S.M. Copley (Eds.), Warrendale, PA, USA
- A.J. Pedraza, in: J. Singh, S.M. Copley (Eds.), Int. Conf. on Beam Processing of Advanced Materials, Minerals, Metals, and Mater. Soc., Warrendale, PA, USA, 1993, p. 69.
- (1993) Int. Conf. on Beam Processing of Advanced Materials, Minerals, Metals, and Mater. Soc. , pp. 69
- Pedraza, A.J.¹

12
- 0346394511
- D.B. Chrisey, G.K. Hubler (Eds.), Ch. 7, Wiley, New York
- K.L. Saenger, in: D.B. Chrisey, G.K. Hubler (Eds.), Pulsed Laser Deposition of Thin Films, Ch. 7, Wiley, New York, 1994, p. 204.
- (1994) Pulsed Laser Deposition of Thin Films , pp. 204
- Saenger, K.L.¹

13
- 0001306707
- S.S. Fisher (Ed.), AIAA, New York
- C. Cercignani, in: S.S. Fisher (Ed.), Rarefied Gas Dynamics, AIAA, New York, 1981, p. 305.
- (1981) Rarefied Gas Dynamics , pp. 305
- Cercignani, C.¹

14
- 21544440872
- D. Sibold, H.M. Urbassek, Phys. Rev. A 43 (1991) 6722.
- (1991) Phys. Rev. A , vol.43 , pp. 6722
- Sibold, D.¹ Urbassek, H.M.²

15
- 0039154033
- T.J. Harris, IBM J. Res. Dev. 7 (1963) 342.
- (1963) IBM J. Res. Dev. , vol.7 , pp. 342
- Harris, T.J.¹

16
- 0001656468
- B. Braren, K.G. Casey, R. Kelly, Nucl. Instr. Meth. B 58 (1991) 463.
- (1991) Nucl. Instr. Meth. B , vol.58 , pp. 463
- Braren, B.¹ Casey, K.G.² Kelly, R.³

17
- 5944256852
- A. Gupta, B. Braren, K.G. Casey, B.W. Hussey, R. Kelly, Appl. Phys. Lett. 59 (1991) 1302.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 1302
- Gupta, A.¹ Braren, B.² Casey, K.G.³ Hussey, B.W.⁴ Kelly, R.⁵

18
- 36449007845
- R.A. Lindley, R.M. Gilgenbach, C.H. Ching, J.S. Lash, G.L. Doll, J. Appl. Phys. 76 (1994) 5457.
- (1994) J. Appl. Phys. , vol.76 , pp. 5457
- Lindley, R.A.¹ Gilgenbach, R.M.² Ching, C.H.³ Lash, J.S.⁴ Doll, G.L.⁵

19
- 0008910044
- R.M. Gilgenbach, P.L.G. Ventzek, Appl. Phys. Lett. 58 (1991) 1597.
- (1991) Appl. Phys. Lett. , vol.58 , pp. 1597
- Gilgenbach, R.M.¹ Ventzek, P.L.G.²

20
- 0029373790
- W. Pietsch, B. Dubreuil, A. Briand, Appl. Phys. B 61 (1995) 267.
- (1995) Appl. Phys. B , vol.61 , pp. 267
- Pietsch, W.¹ Dubreuil, B.² Briand, A.³

21
- 0000816453
- D.B. Geohegan, Appl. Phys. Lett. 60 (1992) 2732.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 2732
- Geohegan, D.B.¹

22
- 0026946833
- D.B. Geohegan, Thin Solid Films 220 (1992) 138.
- (1992) Thin Solid Films , vol.220 , pp. 138
- Geohegan, D.B.¹

23
- 0030563097
- A. Mele, A. Giardini Guidoni, R. Kelly, A. Miotello, S. Orlando, R. Teghil, Appl. Surf. Sci. 96-98 (1996) 102.
- (1996) Appl. Surf. Sci. , vol.96-98 , pp. 102
- Mele, A.¹ Giardini Guidoni, A.² Kelly, R.³ Miotello, A.⁴ Orlando, S.⁵ Teghil, R.⁶

24
- 0030219158
- A. Mele, A. Giardini Guidoni, R. Kelly, A. Miotello, S. Orlando, R. Teghil, C. Flamini, Nucl. Instr. Meth. B 116 (1996) 257.
- (1996) Nucl. Instr. Meth. B , vol.116 , pp. 257
- Mele, A.¹ Giardini Guidoni, A.² Kelly, R.³ Miotello, A.⁴ Orlando, S.⁵ Teghil, R.⁶ Flamini, C.⁷

25
- 0002717134
- R. Kelly, A. Miotello, B. Braren, A. Gupta, K. Casey, Nucl. Instr. Meth. B 65 (1992) 187.
- (1992) Nucl. Instr. Meth. B , vol.65 , pp. 187
- Kelly, R.¹ Miotello, A.² Braren, B.³ Gupta, A.⁴ Casey, K.⁵

26
- 0347229414
- D.B. Chrisey, G.K. Hubler (Eds.), Ch. 3, Wiley, New York
- R. Kelly, A. Miotello, in: D.B. Chrisey, G.K. Hubler (Eds.), Pulsed Laser Deposition of Thin Films, Ch. 3, Wiley, New York, 1994, p. 56.
- (1994) Pulsed Laser Deposition of Thin Films , pp. 56
- Kelly, R.¹ Miotello, A.²

27
- 0031546722
- R. Kelly, A. Miotello, Nucl. Instr. Meth. B 122 (1997) 374.
- (1997) Nucl. Instr. Meth. B , vol.122 , pp. 374
- Kelly, R.¹ Miotello, A.²

28
- 0003964139
- J.C. Miller, R.F. Haglund (Eds.), Ch. 5, Academic Press, San Diego, CA, USA
- R. Kelly, A. Miotello, A. Mele, A. Giardini Guidoni, in: J.C. Miller, R.F. Haglund (Eds.), Laser Ablation and Desorption, Ch. 5, Academic Press, San Diego, CA, USA, 1998.
- (1998) Laser Ablation and Desorption
- Kelly, R.¹ Miotello, A.² Mele, A.³ Giardini Guidoni, A.⁴

29
- 0016944202
- M.M. Martynyuk, Sov. Phys. Tech. Phys. 21 (1976) 430.
- (1976) Sov. Phys. Tech. Phys. , vol.21 , pp. 430
- Martynyuk, M.M.¹

30
- 0019266574
- W. Fucke, U. Seydel, High Temp. - High Pressures 12 (1980) 419.
- (1980) High Temp. - High Pressures , vol.12 , pp. 419
- Fucke, W.¹ Seydel, U.²

31
- 84927354978
- C.T. Avedisian, J. Phys. Chem. Ref. Data 14 (1985) 695.
- (1985) J. Phys. Chem. Ref. Data , vol.14 , pp. 695
- Avedisian, C.T.¹

32
- 0015299784
- F.W. Dabby, U-C. Paek, IEEE J. Quantum Opt. QE-8 (1972) 106.
- (1972) IEEE J. Quantum Opt. , vol.QE-8 , pp. 106
- Dabby, F.W.¹ Paek, U.-C.²

33
- 36449001557
- D. Bhattacharya, R.K. Singh, P.H. Holloway, J. Appl. Phys. 70 (1991) 5433.
- (1991) J. Appl. Phys. , vol.70 , pp. 5433
- Bhattacharya, D.¹ Singh, R.K.² Holloway, P.H.³

34
- 0030563105
- R. Kelly, A. Miotello, Appl. Surf. Sci. 96-98 (1996) 205.
- (1996) Appl. Surf. Sci. , vol.96-98 , pp. 205
- Kelly, R.¹ Miotello, A.²

35
- 24444466746
- in press
- R. Kelly, A. Miotello, Nucl. Instr. Meth. B (in press).
- Nucl. Instr. Meth. B
- Kelly, R.¹ Miotello, A.²

36
- 0000044879
- G.M. Pound, J. Phys. Chem. Ref. Data 1 (1972) 135.
- (1972) J. Phys. Chem. Ref. Data , vol.1 , pp. 135
- Pound, G.M.¹

37
- 0016375951
- M.M. Martynyuk, Sov. Phys. Tech. Phys. 19 (1974) 793.
- (1974) Sov. Phys. Tech. Phys. , vol.19 , pp. 793
- Martynyuk, M.M.¹

38
- 0029515961
- A. Miotello, R. Kelly, Appl. Phys. Lett. 67 (1995) 3535.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 3535
- Miotello, A.¹ Kelly, R.²

39
- 0347655359
- in press
- R. Kelly, A. Miotello, Mater. Sci. Eng. (in press).
- Mater. Sci. Eng.
- Kelly, R.¹ Miotello, A.²

40
- 0345763415
- Center, Columbus, OH, USA
- Engineering Property Data on Selected Ceramics, Vol. 1, Nitrides, Metals and Ceramics Inform. Center, Columbus, OH, USA, 1976.
- (1976) Engineering Property Data on Selected Ceramics, Vol. 1, Nitrides, Metals and Ceramics Inform , vol.1

41
- 0026290820
- V.L. Vinogradov, A.V. Kostanovskii, A.V. Kirillin, High Temp.-High Pressures 23 (1991) 685.
- (1991) High Temp.-High Pressures , vol.23 , pp. 685
- Vinogradov, V.L.¹ Kostanovskii, A.V.² Kirillin, A.V.³

42
- 0000559621
- T.B. Massalski (Ed.), 2nd edn., ASM Int., Materials Park, OH, USA
- H.A. Wriedt, in: T.B. Massalski (Ed.), Binary Alloy Phase Diagrams, vol. 1, 2nd edn., ASM Int., Materials Park, OH, USA, 1990, p. 176.
- (1990) Binary Alloy Phase Diagrams , vol.1 , pp. 176
- Wriedt, H.A.¹

43
- 36449001364
- R.W. Dreyfus, J. Appl. Phys. 69 (1991) 1721.
- (1991) J. Appl. Phys. , vol.69 , pp. 1721
- Dreyfus, R.W.¹

44
- 0028419917
- M.J. DeSilva, A.J. Pedraza, D.H. Lowndes, J. Mater. Res. 9 (1994) 1019.
- (1994) J. Mater. Res. , vol.9 , pp. 1019
- DeSilva, M.J.¹ Pedraza, A.J.² Lowndes, D.H.³

45
- 0029203891
- S. Cao, A.J. Pedraza, L.F. Allard, J. Mater. Res. 10 (1995) 54.
- (1995) J. Mater. Res. , vol.10 , pp. 54
- Cao, S.¹ Pedraza, A.J.² Allard, L.F.³

46
- 0001739435
- D.R. Ermer, S.C. Langford, J.T. Dickinson, J. Appl. Phys. 81 (1997) 1495.
- (1997) J. Appl. Phys. , vol.81 , pp. 1495
- Ermer, D.R.¹ Langford, S.C.² Dickinson, J.T.³

47
- 0029321480
- T. Akiba, Y. Akimune, N. Hirosaki, J.T. Dickinson, J. Mater. Sci. Lett. 14 (1995) 898.
- (1995) J. Mater. Sci. Lett. , vol.14 , pp. 898
- Akiba, T.¹ Akimune, Y.² Hirosaki, N.³ Dickinson, J.T.⁴

48
- 0000425484
- R. Kelly, A. Miotello, Appl. Phys. B 57 (1993) 145.
- (1993) Appl. Phys. B , vol.57 , pp. 145
- Kelly, R.¹ Miotello, A.²

49
- 0347655263
- in preparation
- R. Kelly, A. Mele, A. Miotello, A. Giardini Guidoni, J.W. Hastie, P.K. Schenck, H. Okabe, in preparation.
- Kelly, R.¹ Mele, A.² Miotello, A.³ Giardini Guidoni, A.⁴ Hastie, J.W.⁵ Schenck, P.K.⁶ Okabe, H.⁷

50
- 0004208617
- Wiley, New York
- H.W. Liepmann, A. Roshko, Elements of Gasdynamics, Wiley, New York, 1957, p. 79.
- (1957) Elements of Gasdynamics , pp. 79
- Liepmann, H.W.¹ Roshko, A.²

51
- 0001359286
- D.A. Freiwald, J. Appl. Phys. 43 (1972) 2224.
- (1972) J. Appl. Phys. , vol.43 , pp. 2224
- Freiwald, D.A.¹

52
- 36549104055
- P.E. Dyer, R.D. Greenough, A. Issa, P.H. Key, Appl. Phys. Lett. 53 (1988) 534.
- (1988) Appl. Phys. Lett. , vol.53 , pp. 534
- Dyer, P.E.¹ Greenough, R.D.² Issa, A.³ Key, P.H.⁴

53
- 0039746469
- H.P. Greenspan, D.S. Butler, J. Fluid Mech. 13 (1962) 101.
- (1962) J. Fluid Mech. , vol.13 , pp. 101
- Greenspan, H.P.¹ Butler, D.S.²

54
- 84984136480
- J. Pastrn̂ák, L. Roskovcová, Phys. Status Solidi 26 (1968) 591.
- (1968) Phys. Status Solidi , vol.26 , pp. 591
- Pastrn̂ák, J.¹ Roskovcová, L.²

55
- 0015571420
- W.M. Yim, E.J. Stofko, P.J. Zanucchi, J.I. Pankove, M. Ettenberg, S.L. Gilbert, J. Appl. Phys. 44 (1973) 292.
- (1973) J. Appl. Phys. , vol.44 , pp. 292
- Yim, W.M.¹ Stofko, E.J.² Zanucchi, P.J.³ Pankove, J.I.⁴ Ettenberg, M.⁵ Gilbert, S.L.⁶

56
- 0039746473
- C.R. Aita, C.J.G. Kubiak, F.Y.H. Shih, J. Appl. Phys. 66 (1989) 4360.
- (1989) J. Appl. Phys. , vol.66 , pp. 4360
- Aita, C.R.¹ Kubiak, C.J.G.² Shih, F.Y.H.³

57
- 0001003336
- G. Radhakrishnan, J. Appl. Phys. 78 (1995) 6000.
- (1995) J. Appl. Phys. , vol.78 , pp. 6000
- Radhakrishnan, G.¹

58
- 0043055765
- C.R. Aita, W.S. Tait, Nanostruct. Mater. 1 (1992) 269.
- (1992) Nanostruct. Mater. , vol.1 , pp. 269
- Aita, C.R.¹ Tait, W.S.²

59
- 0001293878
- L.H. Dreger, V.V. Dadape, J.L. Margrave, J. Phys. Chem. 66 (1962) 1556.
- (1962) J. Phys. Chem. , vol.66 , pp. 1556
- Dreger, L.H.¹ Dadape, V.V.² Margrave, J.L.³

60
- 0001036462
- N. Morita, T. Watanabe, Y. Yoshida, Appl. Phys. Lett. 54 (1989) 1974.
- (1989) Appl. Phys. Lett. , vol.54 , pp. 1974
- Morita, N.¹ Watanabe, T.² Yoshida, Y.³

61
- 0012025863
- J.M. Liu, R. Yen, H. Kurz, N. Bloembergen, Appl. Phys. Lett. 39 (1981) 755.
- (1981) Appl. Phys. Lett. , vol.39 , pp. 755
- Liu, J.M.¹ Yen, R.² Kurz, H.³ Bloembergen, N.⁴

62
- 0021428234
- J.M. Liu, L.A. Lompre, H. Kurz, N. Bloembergen, Appl. Phys. A 34 (1984) 25.
- (1984) Appl. Phys. A , vol.34 , pp. 25
- Liu, J.M.¹ Lompre, L.A.² Kurz, H.³ Bloembergen, N.⁴

63
- 0027189018
- D.H. Lowndes, M. DeSilva, M.J. Godbole, A.J. Pedraza, D.B. Geohegan, Mater. Res. Soc. Symp. Proc. 285 (1993) 191.
- (1993) Mater. Res. Soc. Symp. Proc. , vol.285 , pp. 191
- Lowndes, D.H.¹ DeSilva, M.² Godbole, M.J.³ Pedraza, A.J.⁴ Geohegan, D.B.⁵

64
- 0022027577
- R. Kelly, J.E. Rothenberg, Nucl. Instr. Meth. B 7/8 (1985) 755.
- (1985) Nucl. Instr. Meth. B , vol.7-8 , pp. 755
- Kelly, R.¹ Rothenberg, J.E.²

65
- 0000115861
- M.M. Martynyuk, Russ. J. Phys. Chem. 57 (1983) 494.
- (1983) Russ. J. Phys. Chem. , vol.57 , pp. 494
- Martynyuk, M.M.¹

66
- 33750196096
- Y-J. Do, T-T. Yen, L-R. Chen, J. Phys. F: Metal Phys. 14 (1984) L141.
- (1984) J. Phys. F: Metal Phys. , vol.14
- Do, Y.-J.¹ Yen, T.-T.² Chen, L.-R.³

67
- 0038004266
- R.M. Gilgenbach, C.H. Ching, J.S. Lash, R.A. Lindley, Phys. Plasmas 1 (1994) 1619.
- (1994) Phys. Plasmas , vol.1 , pp. 1619
- Gilgenbach, R.M.¹ Ching, C.H.² Lash, J.S.³ Lindley, R.A.⁴

68
- 0028444328
- M. Ohkoshi, T. Yoshitake, K. Tsushima, Appl. Phys. Lett. 64 (1994) 3340.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 3340
- Ohkoshi, M.¹ Yoshitake, T.² Tsushima, K.³

69
- 0043194716
- K. Scott, J.M. Huntley, W.A. Phillips, J. Clarke, J.E. Field, Appl. Phys. Lett. 57 (1990) 922.
- (1990) Appl. Phys. Lett. , vol.57 , pp. 922
- Scott, K.¹ Huntley, J.M.² Phillips, W.A.³ Clarke, J.⁴ Field, J.E.⁵

70
- 0001543436
- P.E. Dyer, A. Issa, P.H. Key, Appl. Phys. Lett. 57 (1990) 186.
- (1990) Appl. Phys. Lett. , vol.57 , pp. 186
- Dyer, P.E.¹ Issa, A.² Key, P.H.³

71
- 0000577452
- R. Kelly, A. Miotello, B. Braren, C.E. Otis, Appl. Phys. Lett. 60 (1992) 2980.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 2980
- Kelly, R.¹ Miotello, A.² Braren, B.³ Otis, C.E.⁴

72
- 0000266273
- A. Miotello, R. Kelly, B. Braren, C.E. Otis, Appl. Phys. Lett. 61 (1992) 2784.
- (1992) Appl. Phys. Lett. , vol.61 , pp. 2784
- Miotello, A.¹ Kelly, R.² Braren, B.³ Otis, C.E.⁴

73
- 0001470938
- R. Kelly, A. Miotello, Nucl. Instr. Meth. B 91 (1994) 682.
- (1994) Nucl. Instr. Meth. B , vol.91 , pp. 682
- Kelly, R.¹ Miotello, A.²

74
- 0018920467
- M.M. Martynyuk, Radio Eng. Elec. Phys. 25 (1980) 100.
- (1980) Radio Eng. Elec. Phys. , vol.25 , pp. 100
- Martynyuk, M.M.¹

75
- 0345763413
- G. Mehlman, D.B. Chrisey, J.S. Horwitz, P.G. Burkhalter, R.C.Y. Auyeung, D.A. Newman, Appl. Phys. Lett. 63 (1993) 2490.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 2490
- Mehlman, G.¹ Chrisey, D.B.² Horwitz, J.S.³ Burkhalter, P.G.⁴ Auyeung, R.C.Y.⁵ Newman, D.A.⁶

76
- 0040338462
- D.B. Chrisey, G.K. Hubler (Eds.), Ch. 5, Wiley, New York
- D.B. Geohegan, in: D.B. Chrisey, G.K. Hubler (Eds.), Pulsed Laser Deposition of Thin Films, Ch. 5, Wiley, New York, 1994, p. 156.
- (1994) Pulsed Laser Deposition of Thin Films , pp. 156
- Geohegan, D.B.¹

77
- 0347024505
- E. Fogarassy, S. Lazare (Eds.), Elsevier, Amsterdam
- D.B. Geohegan, in: E. Fogarassy, S. Lazare (Eds.), Laser Ablation of Electronic Materials, Elsevier, Amsterdam, 1992, p. 85.
- (1992) Laser Ablation of Electronic Materials , pp. 85
- Geohegan, D.B.¹

78
- 0017463088
- 13? (1977?)
- M.M. Martynyuk, Phys. Combustion and Explosions, 13? (1977?) 178.
- Phys. Combustion and Explosions , pp. 178
- Martynyuk, M.M.¹

79
- 0016025234
- F.P. Gagliano, U-C. Paek, Appl. Opt. 13 (1974) 274.
- (1974) Appl. Opt. , vol.13 , pp. 274
- Gagliano, F.P.¹ Paek, U.-C.²

80
- 0025211194
- S. Otsubo, T. Minamikawa, Y. Yonezawa, A. Morimoto, T. Shimizu, Jpn. J. Appl. Phys. 29 (1990) L73.
- (1990) Jpn. J. Appl. Phys. , vol.29
- Otsubo, S.¹ Minamikawa, T.² Yonezawa, Y.³ Morimoto, A.⁴ Shimizu, T.⁵

81
- 0038851154
- R.K. Singh, D. Bhattacharya, J. Narayan, Appl. Phys. Lett. 57 (1990) 2022.
- (1990) Appl. Phys. Lett. , vol.57 , pp. 2022
- Singh, R.K.¹ Bhattacharya, D.² Narayan, J.³

82
- 0000052222
- O. Guillot-Noël, R. Gomez-San Roman, J. Perrière, J. Hermann, V. Craciun, H. Boulmer-Leborgne, P. Parboux, J. Appl. Phys. 80 (1996) 1803.
- (1996) J. Appl. Phys. , vol.80 , pp. 1803
- Guillot-Noël, O.¹ Gomez-San Roman, R.² Perrière, J.³ Hermann, J.⁴ Craciun, V.⁵ Boulmer-Leborgne, H.⁶ Parboux, P.⁷

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