The morphology of diamond grown by hot filament chemical vapor deposition

Diamond and Related Materials

Volumn 7, Issue 8, 1998, Pages 1201-1206

  Menon, Prabhjot Mehta ^a   Clausing, R E ^b   Heatherly, L ^b   Feigerle, C S ^a  

^a UNIVERSITY OF TENNESSEE   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Chemical vapor deposition; Crystal morphology; Diamond film growth; Hot filament CVD

Indexed keywords

CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; FILM GROWTH; REACTION KINETICS;

HOT FILAMENT CHEMICAL VAPOR DEPOSITION; HOT FILAMENT REACTORS;

DIAMOND FILMS;

EID: 0032137483     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00178-2     Document Type: Article

References (16)

1. B.V. Spitsyn, in: D.T.J. Hurle (Ed.), Handbook of Crystal Growth, vol. 3, North Holland Press, Amsterdam, 1994, p. 403.
2. W.A. Yarbrough, R. Messier, Science 247 (1990) 688.
3. W. Piekarczyk, W.A. Yarbrough, J. Cryst. Growth 108 (1991) 583.
4. J.E. Butler, R.L. Woodin, Philos. Trans. Roy. Soc. London A342 (1993) 209.
5. K.E. Spear, M. Frenklach, in: K.E. Spear, J.P. Dismukes (Eds.), Synthetic Diamond: Emerging CVD Science and Technology, John Wiley & Sons, Inc., New York, 1994, p. 243.
6. R.E. Clausing, in: M. Prelas, G. Popovici, L.K. Bigelow (Eds.), Handbook of Industrial Diamonds and Diamond Films, Marcel Dekker, Inc., New York, 1998, p. 19.
7. A. van der Drift, Phillips Res. Rep. 22 (1967) 267.
8. R.E. Clausing, L. Heatherly, L.L. Horton, E.D. Specht, G.M. Begun, Z.L. Wang, Diamond Relat. Mater. 1 (1992) 411.
9. R.E. Clausing, L. Heatherly, E.D. Specht, in: R.E. Clausing, L.L. Horton, J.C Angus, P. Koidl (Eds.), Diamond and Diamond-like Films and Coatings, NATO ASI series B, vol. 266, Plenum Press, New York, 1991, p. 611.
10. H.M. Maeda, K. Ohtsubo, M. Irie, N. Ohya, K. Kusakabe, S. Morooka, J. Mater. Res. 10 (1995) 3115.
11. C.J. Chu, R.H. Hauge, J.L. Margrave, M.P. D'Evelyn, Appl. Phys. Lett. 61 (1992) 1393.
12. M.A. Tamor, M.P. Everson, J. Mater. Res. 9 (1994) 1839.
13. C. Wild, R. Kohl, N. Herres, W. Muller-Sebert, P. Koidl, Diamond Relat. Mater. 3 (1994) 373.
14. R.E. Clausing, L. Heatherly, K.L. More, G.M. Begun, Surf. Coat. Technol. 39/40 (1989) 199.
15. P. Mehta, Ph.D. Thesis, University of Tennessee, Knoxville, TN, 1997.
16. M. Frenklach, S. Skokov, B. Weiner, Nature 372 (1994) 535.