Microdoped and microcompensated amorphous silicon films for infrared detection

IEEE Photonics Technology Letters

Volumn 10, Issue 8, 1998, Pages 1147-1149

  Caputo, D ^a   Nascetti, A ^a   Palma, F ^a  

^a SAPIENZA UNIVERSITY OF ROME   (Italy)

Author keywords

Amorphous silicon; Infrared detectors; Infrared image sensors; Silicon radiation detectors; Thin film devices

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; BORON; CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); INFRARED RADIATION; LIGHT ABSORPTION; PHOSPHORUS; SEMICONDUCTOR JUNCTIONS; THIN FILM DEVICES;

INFRARED IMAGE SENSOR; SILICON RADIATION DETECTOR;

INFRARED DETECTORS;

EID: 0032137210     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.701531     Document Type: Article

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