Integration of sensors and GaAs electronic circuits on a single chip

Mechatronics

Volumn 8, Issue 5, 1998, Pages 441-458

  Choi, Jun Rim ^a   Park, Sekwang ^a  

^a Kyungpook National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; DEFLECTION (STRUCTURES); INFRARED DETECTORS; MATHEMATICAL MODELS; MESFET DEVICES; MICROMACHINING; PIEZOELECTRICITY; PYROELECTRICITY; SEMICONDUCTING GALLIUM ARSENIDE; SUBSTRATES; THIN FILMS; ZINC OXIDE;

DEFLECTION THEORY; PIEZOELECTRIC PRESSURE SENSORS;

MICROSENSORS;

EID: 0032136632     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0957-4158(98)00014-2     Document Type: Article

References (14)

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