Current density distribution measurement of negative point-to-plane corona discharge

IEEE Transactions on Instrumentation and Measurement

Volumn 47, Issue 4, 1998, Pages 907-913

  Madani, Mohammad R ^a   Miller, Toby A ^a  

^a UNIVERSITY OF LOUISIANA AT LAFAYETTE   (United States)

Author keywords

CAMAC (computer automated measurement and control); Corona; Current density; Oxidation; Ozone; Plasma; Semiconductor materials; Silicon

Indexed keywords

COMPUTER CONTROL SYSTEMS; CURRENT DENSITY; ELECTRIC CURRENT DISTRIBUTION MEASUREMENT; ELECTRIC POTENTIAL; ELECTRODES; OXIDATION; PROBES; SEMICONDUCTING SILICON; SEMICONDUCTOR PLASMAS;

NEGATIVE POINT-TO-PLANE CORONA DISCHARGES;

ELECTRIC CORONA;

EID: 0032131596     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.744641     Document Type: Article

References (10)

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