Optical emission diagnostics in cascade arc plasma polymerization and surface modification processes

Journal of Polymer Science, Part A: Polymer Chemistry

Volumn 36, Issue 10, 1998, Pages 1583-1592

  Yu, Q S ^a   Krentsel, E ^a   Yasuda, H K ^a  

^a University of Missouri   (United States)

Author keywords

Cascade arc; Fluorination; Optical emission spectroscopy; Plasma polymerization; Surface modification

Indexed keywords

ELECTRIC ARCS; ELECTRON ENERGY LEVELS; FLUOROCARBONS; IONIZATION OF GASES; LIGHT EMISSION; METHANE; METHANOL; NITROGEN; PLASMA DIAGNOSTICS; PLASMA JETS; POLYMERS; SURFACE TREATMENT;

FLUORINATION; OPTICAL EMISSION SPECTROSCOPY (OES);

POLYMERIZATION;

EID: 0032122880     PISSN: 0887624X     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-0518(19980730)36:10<1583::AID-POLA10>3.0.CO;2-C     Document Type: Article

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