Deposition of multiphase molybdate thin films by reactive sputtering

Thin Solid Films

Volumn 324, Issue 1-2, 1998, Pages 52-62

  Zou, Joe Y ^a,b   Schrader, Glenn L ^a  

^a Iowa State University of Science and Technology   (United States)

^b Hoechst Celanese Corporation   (United States)

Author keywords

Deposition; Molybdate thin films; Reactive sputtering

Indexed keywords

METALLIC SUPERLATTICES; MOLYBDENUM COMPOUNDS; PRESSURE EFFECTS; SPUTTER DEPOSITION; THERMAL EFFECTS; THIN FILMS;

MOLYBDATE THIN FILMS; REACTIVE SPUTTERING;

METALLIC FILMS;

EID: 0032122187     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)01031-6     Document Type: Article

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