Characterization of cubic boron nitride thin films grown on different substrates

Materials Letters

Volumn 36, Issue 1-4, 1998, Pages 206-209

  Ma, Xiying ^a   Yue, Jinshun ^a   He, Deyan ^a   Chen, Guanghua ^b  

^a LANZHOU UNIVERSITY   (China)

^b BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Adhesion; Buffer layer; c BN

Indexed keywords

ADHESION; CHEMICAL VAPOR DEPOSITION; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NICKEL; SILICON; STAINLESS STEEL; STOICHIOMETRY; SUBSTRATES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

BUFFER LAYERS; PLASMA CHEMICAL VAPOR DEPOSITION;

CUBIC BORON NITRIDE;

EID: 0032122137     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(98)00027-5     Document Type: Article

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