|
Volumn 12, Issue 3, 1998, Pages 447-449
|
Role of boundary conditions in Monte Carlo simulation of microelectromechanical systems
a,c,d b,d,e a,c,d
d
AIAA
(United States)
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ALGORITHMS;
BOUNDARY CONDITIONS;
COMPUTER SIMULATION;
MONTE CARLO METHODS;
DIRECT SIMULATION MONTE CARLO (DSMC) METHODS;
MICROELECTROMECHANICAL DEVICES;
|
EID: 0032120466
PISSN: 08878722
EISSN: None
Source Type: Journal
DOI: 10.2514/2.6358 Document Type: Article |
Times cited : (112)
|
References (8)
|