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Volumn 152, Issue 4-6, 1998, Pages 376-384

Light scattering from a particle on or near a surface

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRAL EQUATIONS; LIGHT; LIGHT REFLECTION; NUMERICAL ANALYSIS; PARTICLES (PARTICULATE MATTER); SURFACES;

EID: 0032119043     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(98)00099-6     Document Type: Article
Times cited : (87)

References (11)
  • 6
    • 0029419016 scopus 로고
    • Light scattering from patterned surfaces and particles on surfaces
    • J.K. Lowell, R.T. Chen, J.P. Mathur (Eds.), Optical Characterization Techniques for High Performance Microelectronic Device Manufacturing II
    • B.M. Nebeker, G.W. Starr, E.D. Hirleman, Light scattering from patterned surfaces and particles on surfaces, in: J.K. Lowell, R.T. Chen, J.P. Mathur (Eds.), Optical Characterization Techniques for High Performance Microelectronic Device Manufacturing II, Proc. SPIE 2638 (1995) 274.
    • (1995) Proc. SPIE , vol.2638 , pp. 274
    • Nebeker, B.M.1    Starr, G.W.2    Hirleman, E.D.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.