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Volumn 33, Issue 13, 1998, Pages 3401-3405
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Microhardness properties of Cu-W amorphous thin films
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
ANNEALING;
BINARY ALLOYS;
COPPER;
COPPER ALLOYS;
CRYSTALLIZATION;
ION BOMBARDMENT;
MAGNETRON SPUTTERING;
MICROHARDNESS;
SPUTTER DEPOSITION;
THIN FILMS;
TUNGSTEN;
COPPER-TUNGSTEN ALLOY;
METALLIC FILMS;
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EID: 0032118304
PISSN: 00222461
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1013201817300 Document Type: Article |
Times cited : (26)
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References (23)
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