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Volumn 33, Issue 13, 1998, Pages 3401-3405

Microhardness properties of Cu-W amorphous thin films

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; BINARY ALLOYS; COPPER; COPPER ALLOYS; CRYSTALLIZATION; ION BOMBARDMENT; MAGNETRON SPUTTERING; MICROHARDNESS; SPUTTER DEPOSITION; THIN FILMS; TUNGSTEN;

EID: 0032118304     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1013201817300     Document Type: Article
Times cited : (26)

References (23)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.