Fabrication and properties of Al2O3 and AlN coatings for fusion reactor blanket by sputtering method

Surface and Coatings Technology

Volumn 106, Issue 1, 1998, Pages 18-22

  Terai, Takayuki ^a   Kobayashi, Tomohiro ^a   Mitsuyama, Takaaki ^a   Yoneoka, Toshiaki ^a   Tanaka, Satoru ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Al2O3; AlN; Fusion reactor; Sputtering

Indexed keywords

ALUMINA; AMORPHOUS FILMS; BREEDING BLANKETS; DENSITY (SPECIFIC GRAVITY); ELECTRIC CONDUCTIVITY OF SOLIDS; LIQUID METAL COOLED REACTORS; NITRIDES; SPUTTER DEPOSITION;

ALUMINUM NITRIDE; FUSION REACTOR BLANKET;

CERAMIC COATINGS;

EID: 0032118285     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00486-1     Document Type: Article

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