Cold plasma extends trace metal detection capability

Semiconductor International

Volumn 21, Issue 8, 1998, Pages 261-262

  Mortensen, Rob ^a   Gluodenis, Tom ^b  

^a ASHLAND INC   (United States)

^b PERKINELMER INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATOMIC SPECTROSCOPY; CALCIUM; CHEMICAL ANALYSIS; HYDROGEN PEROXIDE; IMPURITIES; IONIZATION; IRON; MASS SPECTROMETRY; NITRIC ACID; PLASMAS; POTASSIUM;

COLD PLASMA; INDUCTIVELY COUPLED PLASMA;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0032118111     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

1. Book of SEMI Standards (BOSS), Mountain View, Calif., Semiconductor Equipment and Materials International (SEMI), 1995.
2. S.D. Tanner, M. Paul, S.A. Beres, E.R. Denoyer, "The Application of Cold-Plasma Conditions for the Determination of Trace Levels of Fe, Ca, K, Na, and Li, by ICP-MS," Atomic Spectroscopy, 16(1),:1-6, 1995.
3. S.J. Jiang, R.S. Houk, M.A. Stevens, "Alleviation of Overlap Interferences for Determination of Potassium Isotope Ratios by Inductively Coupled Plasma Mass Spectrometry," Analytical Chemistry, 60(11): 1217-1221, 1988.
4. K. Sakata, K. Kawabata, "Reduction of Fundamental Polyatomic Ions by Inductively Coupled Plasma Mass Spectrometry," Spectrochimica Acta, 49B(10):1027-1038, 1994.
5. T. Jacksier, T.J. Gluodenis, R.J. Thomas, "Determining Critical Trace Elements in High-Purity Hydrochloric Acid by ICP-MS Alone," MICRO, March 1996.
6. R. Jacksier, T.J. Gluodenis, "The Applicability of a Cold Plasma for the Determination of Potassium, Iron, and Calcium in Aggressive Semiconductor Process Solutions," presented at the 22nd Annual Conference of the Federation of Analytical Chemistry and Spectroscopy Societies, Cincinnati, Ohio, October 1995.
7. E. Debrah, S. Beres, T.J. Gluodenis, R.J. Thomas, E.R. Denoyer, "Benefits of a Microconcentric Nebulizer for the Multielement Analysis of Small Sample Volumes by Inductively Coupled Plasma Mass Spectrometry," Atomic Spectroscopy 16(5):197-202, 1995.
8. S.D. Tanner, "Characterization of Ionisation and Matrix Suppression in Inductively Coupled Cold Plasma Mass Spectrometry," 10(11):905-921, 1995.