Prototype microactuators driven by magnetostrictive thin films

IEEE Transactions on Magnetics

Volumn 34, Issue 4 pt 1, 1998, Pages 2042-2044

  Lim, S H ^a   Han, S H ^a   Kim, H J ^a   Choi, Y S ^a   Choi, Jin Woo ^a   Ahn, C H ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MAGNETIC FIELDS; MAGNETIC THIN FILM DEVICES; METALLIC FILMS; SAMARIUM ALLOYS; SILICON; TERBIUM ALLOYS;

MAGNETOSTRICTIVE MICROCANTILEVERS;

MAGNETOSTRICTIVE DEVICES;

EID: 0032117836     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.706786     Document Type: Article

References (4)

1. S. H. Lim Y. S. Choi S. H. Han H. J. Kim T. Shima H. Fujimori Magnetostriction of Tb-Fe-(B) thin films fabricated by rf magnetron sputtering IEEE Trans. Magn. 33 3940 3942 Sept. 1997
2. T. Honda K. I. Arai M. Yamaguchi Fabrication of magnetostrictive actuators using rare-earth (Tb,Sm)-Fe thin films J. Appl. Phys. 76 6994 6999 November 1994
3. E. Quandt Giant magnetostrictive thin film materials and applications J. Alloys Comp. 258 126 132 August 1997